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Antimony selenosulfide (Sb 2 (S,Se) 3), an emerging photovoltaic material, exhibits excellent photovoltaic performance, low toxicity, and high stability with a broad development prospects. High-efficiency Sb 2 (S,Se) 3 solar cells use Spiro-OMeTAD as a hole-transport layer for a long time, which poses serious cost, stability and safety issues. This study applies molybdenum trioxide layer prepared by electron-beam evaporation as an alternative to Spiro-OMeTAD, improving cell stability and reducing the manufacturing cost. Device performance characterization and analysis reveals the significant role of MoO 3 in enhancing charge collection, increasing built-in voltage, and inhibiting carrier recombination. Finally, Sb 2 (S,Se) 3 solar cells with a photoelectric conversion efficiency value of 7.20% were obtained based on the FTO/CdS/Sb 2 (S,Se) 3 /MoO 3 /Au structure. This work could lay the foundation for the further development of stable and efficient fully inorganic Sb 2 (S,Se) 3 solar cells. [Display omitted] • Stable electron beam evaporation-prepared MoO 3 hole-transport layer for Sb 2 (S,Se) 3 solar cells for the first time. • MoO 3 layer can effectively enhance the hole mobility and inhibit the carrier recombination of the device. • Sb 2 (S,Se) 3 with MoO 3 HTL achieved a 7.2 % efficiency based on a high current density of 16.53 mA cm-2. [ABSTRACT FROM AUTHOR]