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Low pressure inductively coupled plasma was investigated with a combination of two diagnostic techniques: catalytic probes and optical emission spectroscopy (actinometry). Three working gases were used: oxygen, oxygen–argon mixture and hydrogen. Concentrations of oxygen and hydrogen atoms were determined in a wide range of plasma parameters, with pressure ranging from 10 Pa to 70 Pa, applied power in the range from 50 to 250 W and at many different positions throughout the system (including the coil and afterglow in sample chamber). Concentrations of oxygen atoms were measured to be 1.3 × 10 15 cm −3 in the middle of the coil and 4 × 10 12 cm −3 in the regions of the chamber furthest from the coil. These spatially resolved concentrations are very important in plasma processing of materials, because radical concentrations over the sample determine plasma–material interactions. This work demonstrates that a relatively simple detection system can be practical and sufficiently successful in many plasma applications. [ABSTRACT FROM AUTHOR]

Abstract: Deposit buildup and fuel entrapment due to amorphous carbon are relevant issues in fusion devices with carbon based plasma facing components. Neutral atomic species play a significant role – atomic hydrogen facilitates the formation of amorphous carbon while atomic oxygen could be used to remove carbon deposits. The kinetics of either reaction depends on the density of neutral species, which in turn is influenced by recombination on the vessel walls. In this work, we measured the probability of heterogeneous recombination of atomic hydrogen and oxygen on amorphous carbon deposits. The recombination coefficients were determined by observing density profiles of atomic species in a closed side-arm of a plasma vessel with amorphous carbon deposit-lined walls. Density profiles were measured with fiber optics catalytic probes. The source of atomic species was inductively coupled radiofrequency plasma. The measured recombination coefficient values were of the order of 10−3 for both species. [Copyright &y& Elsevier]