1. Textures induced by a femtosecond laser on silicon surfaces under various environments
- Author
-
Longpeng Zhou, Zhu Hua, Haifeng Yang, Haidong He, Jingbin Hao, and Jiguo Qian
- Subjects
Materials science ,Silicon ,business.industry ,Hybrid silicon laser ,chemistry.chemical_element ,Laser ,Atomic and Molecular Physics, and Optics ,law.invention ,Wavelength ,Optics ,chemistry ,law ,Femtosecond ,Water environment ,Optoelectronics ,Irradiation ,business ,Engineering (miscellaneous) ,Ultrashort pulse - Abstract
We employ an ultrafast laser with 1 kHz repetition rate and 130 fs pulse width to fabricate micro/nanotextures and unique surface structures on silicon surfaces under different environments. First, we study the effect of vacuum and fabricate micro-spike structures at 800 nm wavelength and a pressure of 4 ⋅ 10−3 Pa. We observe even sub-100 nm ripple structures on micro-spikes after 800 nm laser irradiation in distilled water because the produced bubbles are expelled from the chamber. Finally, we show that submicron-spike structures fabricated after 400 nm laser irradiation in distilled water are smaller than those in vacuum.
- Published
- 2012