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In this study, non-stoichiometry lead-free piezoelectric ceramic Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) thick films were deposited on Pt/Ti/Si substrates using spin-coating method technology to form a LKNNT/Pt/Ti/Si structure of the micro-pressure thick films. Additionally, the influence on the crystalline properties, surface microstructure images, and mechanical properties, and the piezoelectric properties of the non-stoichiometry lead-free piezoelectric ceramic Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) thick films were observed, analyzed, and calculated using X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) microscopy, nano-indention technology, and other instruments. This study was divided into two parts: The first part was the investigation into the fabrication parameters and properties of the bottom layer (Pt) and buffer layer (Ti). The Pt/Ti/Si structures were achieved by the DC sputtering method, and then the rapid thermal annealing (RTA) post-treatment process was used to re-arrange the grains and reduce defects in the lead-free Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) thick films. In the second part, lead-free Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) powder was prepared by the solid-state reaction method, and then acetic acid (C2H4O2) solvent was added to form a slurry for spin-coating technology processing. The fabrication parameters, thick film micro-structure, crystalline properties, nano-indention technology, and the piezoelectric coefficient characteristics of the developed lead-free Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT)/Pt/Ti/Si structure of the micro-pressure thick film devices a were investigated. According to the experimental results, the optimal fabrication processing parameters of the lead-free Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) were an RTA temperature of 500 °C, a Ti buffer-layer thickness of 273.9 nm, a Pt bottom electrode-layer thickness of 376.6 nm, a theoretical density of LKNNT of 4.789 g/cm3, a lattice constant of 3.968 × 10−8 cm, and a d33 value of 150 pm/V. Finally, regarding the mechanical properties of the micro-pressure devices for when a microforce of 3 mN was applied, the thick film revealed a hardness of 60 MPa, a Young's modulus of 13 GPa, and an elasticity interval of 1.25 μm, which are suitable for future applications of micro-pressure devices. [ABSTRACT FROM AUTHOR]

By the conventional solid state reaction method, a small amount of lithium fluoride (LiF) was used as the sintering promoter to improve the sintering and piezoelectric characteristics of (Ba0.95Ca0.05)(Ti0.93Sn0.07)O3 (BCTS) lead-free piezoceramic sheets. Using X-ray diffraction (XRD) and a scanning electron microscope (SEM), the inferences of the crystalline and surface microstructures were obtained and analyzed. Then, the impedance analyzer and d33-meter were used to measure the dielectric and piezoelectric characteristics. In this study, the optimum sintering temperature of the BCTS sheets decreased from 1450 °C to 1390 °C due to LiF doping. For the 0.07 wt % LiF-doped BCTS sheets sintered at 1390 °C, the piezoelectric constant (d33) is 413 pC/N, the electric–mechanical coupling coefficient (kp) is 47.5%, the dielectric loss (tan δ) is 3.9%, and the dielectric constant (εr) is 8100, which are all close to or even better than that of the pure undoped BCTS ceramics. The Curie temperature also improved, from 85 °C for pure BCTS to 140 °C for BCTS–0.07 LiF sheets. Furthermore, by using the vibration system and fixing 1.5 g tip mass at the end of the sheets, as the vibration frequency is 20 Hz, the proposed piezoelectric ceramic sheets also reveal a good energy harvesting performance at the maximum output peak voltage of 4.6 V, which is large enough and can be applied in modern low-power electronic products. [ABSTRACT FROM AUTHOR]

By the conventional solid-state liquid-phase sintering technique, Li0.058(K0.480Na0.535)0.966(Nb0.9Ta0.1)O3+ x wt% ZnO (x = 0, 0.2, 0.4, 0.6, 0.8, 1, 3) lead-free piezoelectric ceramics were fabricated. The addition of ZnO liquid-phase sintering promoters could improve the grain-growth of LKNNT ceramics significantly and its inferences were investigated detailed in this paper. The crystal phases and micro-structures were analyzed by means of the X-ray diffraction and scanning electronic microscopy, respectively. Using the impedance analyzer, the dielectric constant, loss tangent, Curie temperature, phase transition point, and electromechanical coupling factor were measured. And the piezoelectric constants were measured by the d33meter. Compared to pure LKNNT ceramic (sintered at 1090°C, d33= 279 pC/N, and kp= 0.46), for x = 0.6 specimen, even though the optimal d33and kpvalues were only 272 pC/N and kp= 0.44, but the optimal sintering temperature have been improved from 1090°C to 1020°C successfully. [ABSTRACT FROM PUBLISHER]

In this study, a series of Li0.058(K0.480Na0.535)0.966(Nb0.90Ta0.10)O3+ (x)LiF (x = 0, 0.1, 0.2, 0.3, 0.4, 0.5 wt%) lead-free piezoelectric ceramics were fabricated by a conventional solid-state reaction method. The incorporation of LiF could significantly improve the sintering ability of LKNNT ceramics by reducing the optimal sintering temperature from 1090°C to 1020°C. The crystal phases and micro-structures were analyzed by means of the X-ray diffraction and scanning electronic microscopy, respectively. The impedance analyzer was used to measure the Curie temperature, phase transition point, and electro-mechanical coupling factor. And the d33meter was used to measure the piezoelectric constants. From the results, due to the addition of 0.2 wt% LiF, uniform and condensed grains can be obtained and hence the sintering temperature can be lowered down. As the contents of LiF increased, the orthorhombic to tetragonal phase transition points TO-Twere almost no changed, but the Curie temperature TCdecreased from 425°C (x = 0) to 405°C (x = 0.5). And furthermore, the electro-mechanical coupling factor kpand piezoelectric constant d33were all decreased with increases of LiF contents. Hence, even though the reducing of little amount of piezoelectric characteristics, the LiF addition can improve the sintering ability of the LKNNT ceramics effectively. [ABSTRACT FROM PUBLISHER]