1. Amorphous InGaZnO Thin-Film Transistors—Part II: Modeling and Simulation of Negative Bias Illumination Stress-Induced Instability.
- Author
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Kim, Yongsik, Kim, Sungchul, Kim, Woojoon, Bae, Minkyung, Jeong, Hyun Kwang, Kong, Dongsik, Choi, Sunwoong, Kim, Dong Myong, and Kim, Dae Hwan
- Subjects
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AMORPHOUS substances , *ZINC oxide thin films , *THIN film transistors , *SIMULATION methods & models , *PLASMA instabilities , *STRAINS & stresses (Mechanics) , *LOGIC circuits - Abstract
Based on the physical model of amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) and the extracted density of states described in Part I, a quantitative investigation of mechanisms on the negative bias illumination stress (NBIS)-induced threshold voltage VT instability of a-IGZO TFTs is presented. It is found that the shallow donor state-creation model explains the NBIS time evolution of the electrical characteristics very well. Furthermore, the semi-empirical rule of the NBIS-induced \Delta VT is proposed and demonstrated based on the shallow donor state-creation model. The proposed approach can be used to optimize the fabrication process and to explore high-performance thin-film materials for mass-production-level amorphous oxide semiconductor TFTs to be innovatively used in the near future. [ABSTRACT FROM PUBLISHER]
- Published
- 2012
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