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• A low-pass filter has been designed using periodic self-similar coplanar waveguide. • The filter is used in large integrated or hybrid circuits without require wire bonding. • The paper gives the MEMS surface fabrication processing of the filter. • The MEMS switch has relatively lower driven voltag with 26 V. This paper presents a low-pass filter based on microelectromechanical system using periodic self-similar coplanar waveguide. The device is fabricated on 525-μm high-resistivity silicon substrate using surface micromachining process which partial compatible process with IC. The tunable resonant frequency is achieved using micro-electromechanical contact capacitive switches. The total area of the filter is about 6 mm2 including bias lines and pads. The parameters of the filter has been analyzed by applying the Ansoft-HFSS. When switch is on original state, the measured results of the filter show that the 3-dB cutoff frequency is 16.15 GHz with the average insertion loss of 0.95 dB. The 3 dB cut-off frequency of the reconfigurable filters is 22.85 GHz with the average insertion loss of 2.33 dB. A relatively lower driven voltage is around 26 V. [ABSTRACT FROM AUTHOR]

Reconfigurability in an antenna system is a desired characteristic that has been the focus of much research in recent years. The paper demonstrates miniature re-configurable antenna designed and fabricated on the high resistivity Si substrate. This antenna can integrate with a novel microelectromechanical systems actuator for reconfiguring the operating frequency and is used for SoC (System on the chip). The switching between the two different frequency bands is achieved through the use of RF-MEMS switches. According to the open/closed experiment results, when switch is on and off, the antenna operating frequency is 12.3 GHz and 13.1 GHz with low return loss, respectively. The final model radiates at two widely separated frequencies with very similar radiation patterns. The proposed concept can be extended to reconfigurable linear antenna arrays or to more complex antenna structures with large improvements in antenna performance. It is important for the next generation wireless communications and integrated antenna system on the chip. © 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 48: 2413–2416, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21979 [ABSTRACT FROM AUTHOR]