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In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantilever‐based sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self‐assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (k) of the cantilever‐based biosensor is a crucial design parameter for the low‐pressure range and also influence the sensitivity of the microelectromechanical system‐based sensor. Based on the calibration data, the average stiffness of the fabricated microcantilever with and without Au/Cr thin film is 141.39 and 70.53 mN/m, respectively, which is well below the maximum preferred range of stiffness for BioMEMS applications. The fabricated sensor is ultra‐sensitive and selective towards Hg2+ ions in the presence of other heavy metal ions (HMIs) and good enough to achieve a lower limit of detection 0.75 ng/ml (3.73 pM/ml). [ABSTRACT FROM AUTHOR]

The authors report quartz crystal microbalance (QCM) integrated with hexagonal boron nitride–graphene (hg) monolayer heterostructure as a sensor to detect mass flow of sulphur hexafluoride (SF6), an important electrical insulating gas, under humid conditions. Their recent work demonstrated an enhancement in QCM sensing characteristics upon attaching monolayer 2D materials onto the QCM electrode surface and its application for improved relative humidity measurement. Here, they extend this approach to detect flow of SF6 gas causing variation in relative humidity. They fabricated a hg-QCM sensor by transferring the heterostructure thin film onto the QCM electrode surface using a standard wet transfer technique and measured return loss of the QCM under SF6 gas flow at a selected RH condition. The mass flow of the humid SF6 gas effects perturbation in damping at the QCM surface as indicated by changes in the motional resistance of the QCM. The motional resistance changes introduced significant variation in loaded Q-factor, the magnitude of which was gas species-dependent, thus allowing to distinguish SF6 from other common electronics gases. [ABSTRACT FROM AUTHOR]