1. Improving spatial resolution of scanning SQUID microscopy with an on-chip design.
- Author
-
Pan, Y P, Zhu, J J, Feng, Y, Lin, Y S, Wang, H B, Liu, X Y, Jin, H, Wang, Z, Chen, L, and Wang, Y H
- Subjects
SPATIAL resolution ,ELECTRON beam lithography ,SUPERCONDUCTING quantum interference devices ,SQUIDS ,MICROSCOPY - Abstract
Scanning superconducting quantum interference device (sSQUID) microscopy is currently one of the most effective methods for direct and sensitive magnetic flux imaging on the mesoscopic scale. A SQUID-on-chip (SOC) design allows integration of field coils for susceptometry in a gradiometer setup which is very desirable for measuring magnetic responses of quantum matter. However, the spatial resolution of such a design has largely been limited to micrometers due to the difficulty in approaching the sample. Here, we used electron beam lithography technology in the fabrication of the 3D nano-bridge-based SQUID devices to prepare pick-up coils with diameters down to 150 nm. Furthermore, we integrated the deep silicon etching process in order to minimize the distance between the pick-up coil and the wafer edge. Combined with a tuning-fork-based scanning head, the sharpness of the etched chip edge enables a precision of 5 nm in height control. By scanning measurements on niobium chessboard samples using these improved SQUID devices, we demonstrate sub-micron spatial resolutions in both magnetometry and susceptometry, significantly better than our previous generations of nano-SQUIDs. Such improvement in spatial resolution of SOC is a valuable progress for magnetic imaging of quantum materials and devices in various modes. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF