1. Simple method to surface slope error characterization using x-ray optics.
- Author
-
Gavinho, L., Cusatis, C., Mazzaro, I., and Tirao, G.
- Subjects
X-ray optics ,GEOMETRIC surfaces ,OPTICAL reflection ,MIRRORS ,SYNCHROTRONS ,OPTICAL diffraction - Abstract
This work shows a method to characterize nearly flat reflective surfaces. Slope error on the mirror surface under the total reflection condition of x rays is measured by perfect crystal rocking curve profile widening. The experiment was performed using a conventional x-ray tube and a simple optical setup. The sensitivity was sufficient to detect at least a slope error of 7 μrad, typical quality for synchrotron mirrors. It is shown that this technique can also be used to characterize roughness and curvature. The method proposed here is an alternative to the traditional techniques for surface characterization and has the advantages of simplicity, versatility and sensitivity, and the synchrotron mirror quality can be evaluated under similar conditions as those for the designed operation. [ABSTRACT FROM AUTHOR]
- Published
- 2005
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