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Resonant Nanoelectromechanical Systems (NEMS) have generated an enormous interest over the last 15 years, driven by a combination of fundamental questions and practical needs. The combination of relatively high frequencies, high quality factors and small masses make them ideal for a plethora of sensing applications. As an example, it has been possible to detect from a single atom landing on a carbon nanotube till single nuclear spin rotations.

Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced nanomechanical devices; it has important implications for applications ranging from quantitative sensing to fundamental research. However, achieving accurate experimental characterization of nonlinearities in nanomechanical systems (NEMS) is problematic. Currently employed detection and actuation schemes themselves tend to be highly nonlinear, and this unrelated nonlinear response has been inadvertently convolved into many previous measurements. In this Letter we describe an experimental protocol and a highly linear transduction scheme, specifically designed for NEMS, that enables accurate, in situ characterization of device nonlinearities. By comparing predictions from Euler-Bernoulli theory for the intra- and intermodal nonlinearities of a doubly clamped beam, we assess the validity of our approach and find excellent agreement.

Parametric resonance and amplification are important in both fundamental physics and technological applications. Here we report very high frequency (VHF) parametric resonators and mechanical-domain amplifiers based on nanoelectromechanical systems (NEMS). Compound mechanical nanostructures patterned by multilayer, top-down nanofabrication are read out by a novel scheme that parametrically modulates longitudinal stress in doubly clamped beam NEMS resonators. Parametric pumping and signal amplification are demonstrated for VHF resonators up to approximately 130 MHz and provide useful enhancement of both resonance signal amplitude and quality factor. We find that Joule heating and reduced thermal conductance in these nanostructures ultimately impose an upper limit to device performance. We develop a theoretical model to account for both the parametric response and nonequilibrium thermal transport in these composite nanostructures. The results closely conform to our experimental observations, elucidate the frequency and threshold-voltage scaling in parametric VHF NEMS resonators and sensors, and establish the ultimate sensitivity limits of this approach.

Euler-Bernoulli beam theory is widely used to successfully predict the linear dynamics of micro- and nano-cantilever beams. However, its capacity to characterize the nonlinear dynamics of these devices has not yet been rigorously assessed, despite its use in nanoelectromechanical systems development. In this article, we report the first highly controlled measurements of the nonlinear response of nanomechanical cantilevers using an ultra-linear detection system. This is performed for an extensive range of devices to probe the validity of Euler-Bernoulli theory in the nonlinear regime. We find that its predictions deviate strongly from our measurements for the nonlinearity of the fundamental flexural mode, which show a systematic dependence on aspect ratio (length/width) together with random scatter. This contrasts with the second mode, which is always found to be in good agreement with theory. These findings underscore the delicate balance between inertial and geometric nonlinear effects in the fundamental mode, and strongly motivate further work to develop theories beyond the Euler-Bernoulli approximation., 24 pages, 6 figures

We describe and demonstrate a new oscillator topology, the parametric feedback oscillator (PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices, and opens the possibility of new classes of oscillators employing innovative frequency-determining elements, like such as nanoelectromechanical systems (NEMS), facilitating integration with circuitry, and reduction in cost and system size reduction. We show that the PFO topology can also improve nanoscale oscillator performance by circumventing detrimental effects that are otherwise imposed by the strong device nonlinearity in this size regime., Comment: 17 pages, 3 figures

Parametric amplification in nanomechanical structures is demonstrated by modulating a purely intrinsic mechanical parameter of the system—the stress—via piezoelectric electromechanical coupling. Large resonance amplitude and quality factor enhancement due to parametric pumping are observed under both vacuum and ambient pressure conditions. Exploration of the region of parametric instability yields results that agree with parametric amplification theory.

We describe a novel amplification scheme based on inducing dynamical changes to the topology of a bifurcation diagram of a simple nonlinear dynamical system. We have implemented a first bifurcation-topology amplifier using a coupled pair of parametrically driven high-frequency nanoelectromechanical systems resonators, demonstrating robust small-signal amplification. The principles that underlie bifurcation-topology amplification are simple and generic, suggesting its applicability to a wide variety of physical, chemical, and biological systems.

Nanoscale integrated circuits and sensors will require methods for unobtrusive interconnection with the macroscopic world to fully realize their potential. We report on a nanoelectromechanical system that may present a solution to the wiring problem by enabling information from multisite sensors to be multiplexed onto a single output line. The basis for this method is a mechanical Fourier transform mediated by piezoelectrically coupled nanoscale resonators. Our technique allows sensitive, linear, and real-time measurement of electrical potentials from conceivably any voltage-sensitive device. With this method, we demonstrate the direct transduction of neuronal action potentials from an extracellular microelectrode. This approach to wiring nanoscale devices could lead to minimally invasive implantable sensors with thousands of channels for in vivo neuronal recording, medical diagnostics, and electrochemical sensing.

We report experimental realization of very thin suspended SiC nanowires (NWs), with widths as small as 20nm, via top-down lithography-nanomachining processes. This enables very high frequency (VHF) nanoscale electromechanical resonators with remarkable performance (e.g., resonance frequency f 0 ∼100MHz, and quality factor Q≫1000) at room temperature. Radio-frequency (RF) characterization of these resonators is achieved by engineering efficient magnetomotive signal transduction into a new compact apparatus, and by enhancing capacitive detection with impedance-matching circuits. Novel designs of top-down SiC NWs with multiple coupling gates lead to demonstrations of devices with versatile and advanced functions in both resonant and static operations.

Efficient actuation is crucial to obtaining optimal performance from nanoelectromechanical systems (NEMS). We employed epitaxial piezoelectric semiconductors to obtain efficient and fully integrated NEMS actuation, which is based on exploitation of the interaction between piezoelectric strain and built-in charge depletion. The underlying actuation mechanism in these depletion-mediated NEMS becomes important only for devices with dimensions approaching semiconductor depletion lengths. The induced actuation forces are controlled electrically, and resonant excitation approaching single-electron efficiency is demonstrated. The fundamental electromechanical coupling itself can be programmed by heterostructure band engineering, externally controllable charge depletion, and crystallographic orientation. These attributes are combined to realize a prototype, mechanically based, exclusive-or logic element.