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We report on influence of neutron radiation on majority and minority carrier traps in n-type 4 H -SiC. Together with the increase of the well-known carbon vacancy (V C) majority carrier related trap, neutron irradiation has introduced two deep traps, labeled as EH1 and EH3 with the activation energies for electron emission estimated as 0.4 and 0.7 eV bellow the conduction band, respectively. Based on Laplace deep level transient spectroscopy (DLTS) results, we have assigned EH1 trap to silicon vacancy (V Si). Two minority carrier traps labelled as B and D-center were detected by minority transient spectroscopy (MCTS) and assigned to substitutional boron B Si and B C , respectively. Activation energies for hole emission for B and D-center are estimated as 0.27 and 0.60 eV above the valence band, respectively. We have identified two emission lines for D-center by Laplace-MCTS measurements and assigned them to B C sitting at hexagonal (− h) and cubic (− k) lattice sites. [ABSTRACT FROM AUTHOR]

Abstract This paper presents the characterization of the electrically active defects created by epithermal and fast neutrons in epitaxial n-type 4H-SiC material using Laplace Deep Level Transient Spectroscopy (Laplace DLTS). While the deep level related to the carbon vacancy has been observed in as-grown material, we observed that epithermal and fast neutron irradiation introduces additional simple defect complexes, with energy levels at E C – 0.40 eV and E C – 0.70 eV. [ABSTRACT FROM AUTHOR]

We report on the metastable defects introduced in the n-type 4H-SiC material by epithermal and fast neutron irradiation. The epithermal and fast neutron irradiation defects in 4H-SiC are much less explored compared to electron or proton irradiation-induced defects. In addition to the carbon vacancy (Vc), silicon vacancy (Vsi) and carbon antisite-carbon vacancy (CAV) complex, the neutron irradiation has introduced four deep-level defects, all arising from the metastable defect, the M-center. The metastable deep-level defects were investigated by deep level transient spectroscopy (DLTS), high-resolution Laplace DLTS (L-DLTS) and isothermal DLTS. The existence of the fourth deep-level defect, M4, recently observed in ion-implanted 4H-SiC, has been additionally confirmed in neutron-irradiated samples. The isothermal DLTS technique has been proven as a useful tool for studying the metastable defects. [ABSTRACT FROM AUTHOR]

Deep level defects created by implantation of light-helium and medium heavy carbon ions in the single ion regime and neutron irradiation in n-type 4H-SiC are characterized by the DLTS technique. Two deep levels with energies 0.4 eV (EH1) and 0.7 eV (EH3) below the conduction band minimum are created in either ion implanted and neutron irradiated material beside carbon vacancies (Z1/2). In our study, we analyze components of EH1 and EH3 deep levels based on their concentration depth profiles, in addition to (−3/=) and (=/−) transition levels of silicon vacancy. A higher EH3 deep level concentration compared to the EH1 deep level concentration and a slight shift of the EH3 concentration depth profile to larger depths indicate that an additional deep level contributes to the DLTS signal of the EH3 deep level, most probably the defect complex involving interstitials. We report on the introduction of metastable M-center by light/medium heavy ion implantation and neutron irradiation, previously reported in cases of proton and electron irradiation. Contribution of M-center to the EH1 concentration profile is presented. [ABSTRACT FROM AUTHOR]