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34 results on '"Christophe, Michel"'

1. Dichroic coatings for astronomical instrumentation

Author

Eléonore Barthélémy-Mazot, Matthieu Coulon, Laurent Pinard, Julien Teillon, Benoît Sassolas, David Hofman, Christophe Michel, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Institut de Physique des 2 Infinis de Lyon (IP2I Lyon), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS]Physics [physics], Ion beam sputtering, Materials science, business.industry, Design study, Large optics, Dichroic glass, 01 natural sciences, Astronomical instrumentation, 010309 optics, Optics, Optical coating, 0103 physical sciences, Ion Assisted Deposition, Ion Beam Sputtering, Coating Characterization, Coating Uniformity, business, 010303 astronomy & astrophysics, Dichroic coatings
Abstract

International audience; Due to the increasing number of astronomical projects and of their associated instruments, the request of large optics with higher optical performances does not stop growing. An important step in the manufacture of these optics is the deposition of high-precision optical coatings. To answer to this request, we developed dichroic coatings, with sharp transition for large optics, working at different angles of incidence and spectral ranges. The work done for the dichroic optics of the HRS and LRS instruments for the 4MOST project will be presented.

Published
2020

2. Characterization of Core Optics in Gravitational-Wave Detectors: Case Study of KAGRA Sapphire Mirrors

Author

Hiroaki Yamamoto, L. Pinard, D. Forest, Bill Reichman, Mark Gross, Liyuan Zhang, Eiichi Hirose, Christophe Michel, G. Billingsley, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics::Instrumentation and Detectors, interferometer, measurement methods, General Physics and Astronomy, 02 engineering and technology, 01 natural sciences, Optics, 0103 physical sciences, KAGRA, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, Physics, Gravitational wave, business.industry, Detector, mirror: surface, 021001 nanoscience & nanotechnology, optics, gravitational radiation detector, Characterization (materials science), Core (optical fiber), Interferometry, Sapphire, High Energy Physics::Experiment, 0210 nano-technology, business, aluminum: oxygen
Abstract

International audience; We report the characterization of superlow-loss optics used in the second-generation gravitational-wave detectors currently in operation. The sapphire test-mass mirrors in the KAGRA detector are introduced as an example, but the techniques here are common to all detectors. In this work, we discuss mainly the surface topography obtained by interferometric techniques and the optical properties obtained with special setups.

Published
2020

3. Prior-damage dynamics in a high-finesse optical enhancement cavity

Author

H. Monard, Laurent Pinard, Kevin Cassou, Lixin Yan, Fabian Zomer, Chuanxiang Tang, Kevin Dupraz, R. Chiche, Wenhui Huang, Daniele Nutarelli, Loïc Amoudry, Aurélien Martens, Jerome Degallaix, Huan Wang, Christophe Michel, Laboratoire de Physique des 2 Infinis Irène Joliot-Curie (IJCLab), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon, Institut de Physique des 2 Infinis de Lyon (IP2I Lyon), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS]Physics [physics], Materials science, Scattering, business.industry, Synchrotron radiation, 01 natural sciences, Atomic and Molecular Physics, and Optics, law.invention, Power (physics), 010309 optics, Coupling (electronics), Finesse, Optics, law, Optical cavity, 0103 physical sciences, Inverse scattering problem, High harmonic generation, Electrical and Electronic Engineering, business, Engineering (miscellaneous)
Abstract

An observation of prior-damage behavior inside a high-finesse optical resonator is reported. Intra-cavity average power drops appeared with magnitude and time scale depending on the power level. Increasing further the incident laser beam power led to irreversible damage of the cavity coupling mirror surface. The origin of this phenomenon is investigated with post mortem mirror surface imaging and analysis of the signals reflected and transmitted by the enhancement cavity. Scattering losses induced by surface deformation due to a hot-spot surface contaminant is found to be most likely the dominant physics process behind this phenomenon.

Published
2020

4. Point defects in IBS coating for very low loss mirrors

Author

Laurent Pinard, Gianpietro Cagnoli, Benoit Sassolas, Viola Sordini, Jerome Degallaix, Sihem Sayah, Christophe Michel, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), Institut de Physique des 2 Infinis de Lyon (IP2I Lyon), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Institut Lumière Matière [Villeurbanne] (ILM), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Claude Bernard Lyon 1 (UCBL), Spectroscopies optiques des matériaux verres, amorphes et à nanoparticules (SOPRANO), Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon

Subjects
Physics - Instrumentation and Detectors, Materials science, Annealing (metallurgy), FOS: Physical sciences, engineering.material, 01 natural sciences, 010309 optics, Micrometre, Laser interferometry, Optics, Coating, 0103 physical sciences, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Electrical and Electronic Engineering, Engineering (miscellaneous), Instrumentation and Methods for Astrophysics (astro-ph.IM), business.industry, Instrumentation and Detectors (physics.ins-det), Crystallographic defect, Atomic and Molecular Physics, and Optics, Optical coating, engineering, Optoelectronics, Spatial frequency, Scattered light, Astrophysics - Instrumentation and Methods for Astrophysics, business
Abstract

High reflective coatings are used in many physics experiments. Despite the high quality of the opticalcoating, the performances of the mirrors is altered by the scattered light induced by micrometers sizedefects in the coating layers. The topic of this paper is the study of the point-like scatterers present in thespecific coating of the mirrors used in state of the art, high sensitivity optical experiments. We studied thebehavior of the materials according to different thicknesses, and how the defects change after annealing.To our knowledge, this is a first insight into the formation of such defects for different materials andthickness and how this is reduced when samples are annealed., Comment: 9 pages, 4 figures, submitted to Applied Optics - OSA

Published
2019
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5. Large and extremely low loss: the unique challenges of gravitational wave mirrors

Author

B. Sassolas, R. Flaminio, Vincent Dolique, L. Pinard, N. Straniero, Danièle Forest, Julien Teillon, Christophe Michel, Gianpetro Cagnoli, M. Granata, Laurent Balzarini, B. Lagrange, Jerome Degallaix, A. Allocca, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Istituto Nazionale di Fisica Nucleare [Pisa] (INFN), Istituto Nazionale di Fisica Nucleare (INFN), Spectroscopies optiques des matériaux verres, amorphes et à nanoparticules (SOPRANO), Institut Lumière Matière [Villeurbanne] (ILM), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique de l'ENS Lyon (Phys-ENS), École normale supérieure de Lyon (ENS de Lyon)-Université Claude Bernard Lyon 1 (UCBL), Laboratoire d'Annecy de Physique des Particules (LAPP), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), École normale supérieure - Lyon (ENS Lyon)-Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon, Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Degallaix, J., Michel, C., Sassolas, B., Allocca, A., Cagnoli, G., Balzarini, L., Dolique, V., Flaminio, R., Forest, D., Granata, M., Lagrange, B., Straniero, N., Teillon, J., and Pinard, L.

Subjects
Astrophysics::High Energy Astrophysical Phenomena, 01 natural sciences, 7. Clean energy, law.invention, 010309 optics, Laser interferometry, General Relativity and Quantum Cosmology, [SPI]Engineering Sciences [physics], Optics, law, 0103 physical sciences, [CHIM]Chemical Sciences, Laser beams, Physics, [PHYS]Physics [physics], Gravitational wave, business.industry, Detector, Near-infrared spectroscopy, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Interferometry, Neutron star, Computer Vision and Pattern Recognition, business
Abstract

International audience; This paper describes the making of large mirrors for laser interferometer gravitational wave detectors. These optics, working in the near infrared, are among the best optics ever created and played a crucial role in the first direct detection of gravitational waves from black holes or neutron star fusions.

Published
2019

6. Vacuum-compatible low-loss Faraday isolator for efficient squeezed-light injection in laser-interferometer-based gravitational-wave detectors

Author

G. Pillant, Julia Casanueva, M. Mantovani, Camilla De Rossi, Christophe Michel, Laurent Pinard, E. Genin, M. Gosselin, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Optical isolator, Extinction ratios, Absorption coefficient, 01 natural sciences, 7. Clean energy, High power lasers, law.invention, 010309 optics, Optics, law, 0103 physical sciences, Thermal, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Electrical and Electronic Engineering, 010306 general physics, Engineering (miscellaneous), Gravitational wave, business.industry, Detector, Quantum noise, Laser, Atomic and Molecular Physics, and Optics, Laser light, Interferometry, Optical elements, business, Squeezed coherent state, Laser beams
Abstract

International audience; In this paper, we present, to the best of our knowledge, the first low-loss vacuum-compatible thermally controlled Faraday isolator able to retain a good isolation factor under high-vacuum working conditions. The throughput that can be obtained with the developed device is as high as 99%, retaining an isolation factor higher than 40 dB. That very high isolation ratio can be kept over long time periods independently from external temperature conditions with a few Celsius degrees of variation due to thermal active control. The mechanical and optical configuration is detailed, and the performances achieved with this device are presented.

Published
2018

8. Mechanical loss in state-of-the-art amorphous optical coatings

Author

Danièle Forest, Gianpietro Cagnoli, R. Flaminio, Alix Cajgfinger, Christophe Michel, Janyce Franc, M. Granata, N. Morgado, L. Pinard, Vincent Dolique, E. Saracco, Jerome Degallaix, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Institut Lumière Matière [Villeurbanne] (ILM), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), National Astronomical Observatory of Japan (NAOJ), and LIGO-Virgo

Subjects
Physics - Instrumentation and Detectors, FOS: Physical sciences, Physics::Optics, engineering.material, 01 natural sciences, Noise (electronics), Optics, Coating, 0103 physical sciences, Astronomical interferometer, 010306 general physics, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, business.industry, Detector, Instrumentation and Detectors (physics.ins-det), Dissipation, Amorphous solid, Interferometry, Optical coating, engineering, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], business, Physics - Optics, Optics (physics.optics)
Abstract

We present the results of mechanical characterizations of many different high-quality optical coatings made of ion-beam-sputtered titania-doped tantala and silica, developed originally for interferometric gravitational-wave detectors. Our data show that in multi-layer stacks (like high-reflection Bragg mirrors, for example) the measured coating dissipation is systematically higher than the expectation and is correlated with the stress condition in the sample. This has a particular relevance for the noise budget of current advanced gravitational-wave interferometers, and, more generally, for any experiment involving thermal-noise limited optical cavities., Comment: 31 pages, 14 figures

Published
2016

9. Mitigation of the spiral pattern induced by the planetary motion

Author

Laurent Balzarini, Jerome Degallaix, R. Flaminio, N. Straniero, Julien Teillon, Gianpietro Cagnoli, Benoit Sassolas, Christophe Michel, David Jonathan Hofman, B. Lagrange, and L. Pinard

Subjects
Masking (art), Materials science, Gravitational wave, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Spectral density, engineering.material, Optics, Coating, Limit (music), Astronomical interferometer, engineering, Sensitivity (control systems), Spiral (railway), business
Abstract

Masking technique and planetary motion are two techniques to improve the coating thickness uniformity. However their combination generates a characteristic pattern like a spiral that can limit the sensitivity of gravitational wave interferometers.

Published
2016

10. Material loss angles from direct measurements of broadband thermal noise

Author

A. E. Villar, Christophe Michel, Innocenzo M. Pinto, Laurent Pinard, N. Morgado, Kenneth G. Libbrecht, Riccardo DeSalvo, Maria Ilaria Del Principe, Vincenzo Pierro, Ilaria Taurasi, Eric D. Black, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Principe, M., Pinto, I. M., Pierro, V., Desalvo, R., Taurasi, I., Villar, A. E., Black, E. D., Libbrecht, K. G., Michel, C., Morgado, N., and Pinard, L.

Subjects
Physics, Nuclear and High Energy Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, Gravitational wave, business.industry, Detector, FOS: Physical sciences, engineering.material, 7. Clean energy, 01 natural sciences, Noise (electronics), Amorphous solid, Interferometry, Optics, Coating, 0103 physical sciences, Astronomical interferometer, engineering, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 010306 general physics, Material properties, business, Physics - Optics, Optics (physics.optics)
Abstract

International audience; We estimate the loss angles of the materials currently used in the highly reflective test-mass coatings of interferometric detectors of gravitational waves, namely Silica, Tantala, and Ti-doped Tantala, from direct measurement of coating thermal noise in an optical interferometer testbench, the Caltech TNI. We also present a simple predictive theory for the material properties of amorphous glassy oxide mixtures, which gives results in good agreement with our measurements on Ti-doped Tantala. Alternative measurement methods and results are reviewed, and some critical issues are discussed.

Published
2015

11. Photometric calibration of an in situ broadband optical thickness monitoring of thin films in a large vacuum chamber

Author

Gianpietro Cagnoli, B. Lagrange, L. Pinard, Christophe Michel, David Jonathan Hofman, Benoit Sassolas, Julien Teillon, Laurent Balzarini, Bertrand David, Eleonore Barthelemy-Mazot, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Materials Science (miscellaneous), engineering.material, 01 natural sciences, (1205240) Photometry, Industrial and Manufacturing Engineering, 010309 optics, Optics, Coating, Sputtering, 0103 physical sciences, (1205700) Reflection, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Calibration, engineering, Light beam, OCIS codes: (3101860) Deposition and fabrication, Vacuum chamber, Business and International Management, Thin film, Reflection coefficient, business, Optical depth
Abstract

International audience; To improve the in situ monitoring of thin films at the Laboratoire des Matériaux Avancés, a broadband optical monitoring of the coated thin films was developed and installed in the biggest ion-beam sputtering machine in the world. Due to the configuration of the coating machine and the chamber strain under vacuum, a standard calibration procedure is impossible and a double-beam optical system is not suitable. A novel theoretical and practical solution to calibrate the measurements was found and is described in this paper. Some relevant results achieved thanks to this technique are discussed as well.

Published
2017

12. Measurements of mechanical thermal noise and energy dissipation in optical dielectric coatings

Author

Ludovic Bellon, Gianpietro Cagnoli, Jerome Degallaix, Christophe Michel, N. Morgado, Tianjun Li, Mickael Geitner, Vincent Dolique, R. Flaminio, Laurent Pinard, Danièle Forest, M. Granata, Felipe Aguilar Sandoval, Laboratoire de Physique de l'ENS Lyon (Phys-ENS), École normale supérieure de Lyon (ENS de Lyon)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Department of Physics ECNU, East China Normal University [Shangaï] (ECNU), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), LABEX Lyon Institute of Origins (ANR-10-LABX-0066) of the Université de Lyon, financial support within the program 'Investissements d'Avenir' (ANR-11-IDEX-0007), École normale supérieure - Lyon (ENS Lyon)-Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon

Subjects
Nuclear and High Energy Physics, Physics - Instrumentation and Detectors, Thermal noise, [PHYS.ASTR.IM]Physics [physics]/Astrophysics [astro-ph]/Instrumentation and Methods for Astrophysic [astro-ph.IM], Annealing (metallurgy), FOS: Physical sciences, Dielectric, engineering.material, 01 natural sciences, Optics, Coating, Dielectric mirror, 0103 physical sciences, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], [PHYS.COND.CM-SM]Physics [physics]/Condensed Matter [cond-mat]/Statistical Mechanics [cond-mat.stat-mech], Composite material, 010306 general physics, Tantala, Instrumentation and Methods for Astrophysics (astro-ph.IM), Condensed Matter - Statistical Mechanics, viscoelasticity, Physics, Condensed Matter - Materials Science, Statistical Mechanics (cond-mat.stat-mech), 010308 nuclear & particles physics, business.industry, coating, Materials Science (cond-mat.mtrl-sci), Silica, Saulson model, dissipation, Instrumentation and Detectors (physics.ins-det), Dissipation, internal damping, structural damping, [SDU.ASTR.IM]Sciences of the Universe [physics]/Astrophysics [astro-ph]/Instrumentation and Methods for Astrophysic [astro-ph.IM], dielectric mirror, Optical coating, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], engineering, annealing, Dielectric loss, Astrophysics - Instrumentation and Methods for Astrophysics, business, Order of magnitude, Physics - Optics, Optics (physics.optics)
Abstract

In recent years an increasing number of devices and experiments are shown to be limited by mechanical thermal noise. In particular sub-Hertz laser frequency stabilization and gravitational wave detectors, that are able to measure fluctuations of 1E-18 m/rtHz or less, are being limited by thermal noise in the dielectric coatings deposited on mirrors. In this paper we present a new measurement of thermal noise in low absorption dielectric coatings deposited on micro-cantilevers and we compare it with the results obtained from the mechanical loss measurements. The coating thermal noise is measured on the widest range of frequencies with the highest signal to noise ratio ever achieved. In addition we present a novel technique to deduce the coating mechanical losses from the measurement of the mechanical quality factor which does not rely on the knowledge of the coating and substrate Young moduli. The dielectric coatings are deposited by ion beam sputtering. The results presented here give a frequency independent loss angle of (4.70 $\pm$ 0.2)x1E-4 with a Young's modulus of 118 GPa for annealed tantala from 10 Hz to 20 kHz. For as-deposited silica, a weak frequency dependence (~ f^{-0.025}) is observed in this frequency range, with a Young's modulus of 70 GPa and an internal damping of (6.0 $\pm$ 0.3)x1E-4 at 16 kHz, but this value decreases by one order of magnitude after annealing and the frequency dependence disappears., Comment: Accepted for publication in Phys. Rev. D

Published
2014

13. Wafer sub-layer impact in OPC/ORC models for advanced node implant layers

Author

Lei Wang, L. Depre, Mu Feng, Jean-Christophe Michel, Frederic Robert, Elodie Sungauer, Sanjay Kapasi, Song Lan, Jean-Christophe Le-Denmat, and Emek Yesilada

Subjects
Computer science, business.industry, engineering.material, Chip, Optics, Optical proximity correction, Coating, engineering, Calibration, Wafer, Node (circuits), Layer (object-oriented design), business, Lithography, Simulation
Abstract

From 28nm technology node and below, Optical Proximity Correction (OPC) needs to take into account light scattering effects from prior layers when bottom anti-reflective coating (BARC) is not used, which is typical for implant layers. In this paper, we implement a sub-layer aware simulation method into a verification tool for Optical Rule Check (ORC) that is used on full 28nm test chip. The sub-layer aware verification can predict defects that are missed by standard ORC. SEM-CD review and defectivity analysis were used to confirm the validity of the sub-layer aware model on wafer.

Published
2014

14. Fast integral rigorous modeling applied to wafer topography effect prediction on 2x nm bulk technologies

Author

Jean-Christophe Michel, Yves Jourlin, A. Tishchenko, and J. C. Le Denmat

Subjects
Materials science, Computational lithography, business.industry, Context (language use), law.invention, Optics, Resist, law, Shallow trench isolation, Computer data storage, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Wafer, Photolithography, business, Lithography
Abstract

Reflection by wafer topography and underlying layers during optical lithography can cause unwanted overexposure in the resist [1]. In most cases, the use of bottom anti reflective coating limits this effect. However, this solution is not always suitable because of process complexity, cost and cycle time penalty, as for ionic implantation lithography process in 28nm bulk technology. As a consequence, computational lithography solutions are currently under development to simulate and correct wafer topographical effects [2], [3]. For ionic implantation source drain (SD) photolithography step, wafer topography influences resulting in implant pattern variation are various: active silicon areas, Poly patterns, Shallow Trench Isolation (STI) and topographical transitions between these areas. In 28nm bulk SD process step, the large number of wafer stack variations involved in implant pattern modulation implies a complex modeling of optical proximity effects. Furthermore, those topography effects are expected to increase with wafer stack complexity through technology node downscaling evolution. In this context, rigorous simulation can bring significant value for wafer topography modeling evolution in R and D process development environment. Unfortunately, classical rigorous simulation engines are rapidly run time and memory limited with pattern complexity for multiple under layer wafer topography simulation. A presentation of a fast rigorous Maxwell’s equation solving algorithm integrated into a photolithography proximity effects simulation flow is detailed in this paper. Accuracy, run time and memory consumption of this fast rigorous modeling engine is presented through the simulation of wafer topography effects during ionic implantation SD lithography step in 28nm bulk technology. Also, run time and memory consumption comparison is shown between presented fast rigorous modeling and classical rigorous RCWA method through simulation of design of interest. Finally, integration opportunity of such fast rigorous modeling method into OPC flow is discussed in this paper.

Published
2014

15. External cavity enhancement of picosecond pulses with 28,000 cavity finesse

Author

Karoly Osvay, R. Flaminio, Péter Jójárt, R. Chiche, Fabian Zomer, L. Pinard, Alessandro Variola, V. Soskov, Adam Borzsonyi, Eric Cormier, Christophe Michel, University of Szeged [Szeged], Laboratoire de l'Accélérateur Linéaire (LAL), Université Paris-Sud - Paris 11 (UP11)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Centre d'Etudes Lasers Intenses et Applications (CELIA), Université de Bordeaux (UB)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), ANR-08-BLAN-0280,MightLaser,Amplification dans une cavité Fabry-Perot d'un laser à fibre picoseconde de très forte puissance moyenne. Application à la production de rayons gamma par interaction Compton.(2008), Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11), Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Bordeaux (UB), Dept. Accelerateurs, and Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11)

Subjects
PHASE, External cavity, POWER, Phase (waves), FREQUENCY, 01 natural sciences, 010309 optics, Finesse, RESONATORS, Optics, 0103 physical sciences, Pulse wave, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Electrical and Electronic Engineering, 010306 general physics, Engineering (miscellaneous), Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, REPETITION-RATE, Atomic and Molecular Physics, and Optics, Pulse (physics), Picosecond, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Whispering-gallery wave, COMB, business, Fabry–Pérot interferometer
Abstract

International audience; We report on the first demonstration, to the best of our knowledge, of the locking of a Fabry–Perot cavity with a finesse of 28,000 in the pulsed regime. The system is based on a stable picosecond oscillator, an ultrastable cavity with high-reflection mirrors, and an all-numerical feedback system that allows efficient and independent control of the repetition rate and the pulse to pulse carrier-to-envelop phase drift (CEP). We show that the carrier to envelop phase can have a dramatic effect even for pulses with hundreds of cycles. Moreover, we have succeeded in unambiguously measuring the CEP of a 2 ps pulse train. Finally, we discuss the potential of our findings to reach the MW average power level stored in an external cavity enhancement architecture.

Published
2013

16. Bulk optical absorption of high resistivity silicon at 1550 nm

Author

M. Granata, Danièle Forest, Teddy Bertrand, Gianpietro Cagnoli, Christophe Michel, R. Flaminio, L. Pinard, Jerome Degallaix, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, High resistivity silicon, Extended X-ray absorption fine structure, Silicon, business.industry, Analytical chemistry, technology, industry, and agriculture, chemistry.chemical_element, 01 natural sciences, Atomic and Molecular Physics, and Optics, eye diseases, 010309 optics, Optics, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Crystalline silicon, sense organs, 010306 general physics, Absorption (electromagnetic radiation), business, Refractive index, Laser beams
Abstract

We report on the measurement of the optical absorption of bulk crystalline silicon at 1550 nm. Using the photodeflection technique, absorption as low as 5 ppm/cm has been measured on a sample with a resistivity of 10 kΩ⋅cm . The absorption as a function of the resistivity has been derived for n-type silicon.

Published
2013

17. Large filters for wide-field survey telescope LSST

Author

R. Flaminio, N. Morgado, Christophe Michel, P. Antilogus, B. Lagrange, Benoit Sassolas, L. Pinard, and D. Forest

Subjects
Materials science, business.industry, law.invention, Telescope, Wavelength, Optics, Transmission (telecommunications), Stack (abstract data type), law, Filter (video), Transmittance, Thin film, Optical filter, business
Abstract

The LSST design foresees the use of six wide-band large optical filters that can alternatively be moved in front of the CCD camera. Each of the six filters has a different band-pass covering all the wavelengths from 300 nm to 1200 nm. The way to achieve this is to coat an optimized optical thin films stack on a filter substrate. Each filter requires a specific design using specific appropriate materials. The main characteristics of these filters, that constitute a real technological challenge, are: their relatively large size - their radii of curvature (about 5.6 m) that represent a sagitta of 12,5 mm that increases the uniformity complexity, the large rejection band requirements with transmission lower than 0.01 % out of the band and a transmission of 95 % over the band-pass. This paper proposes to show the problematic and the results obtained at LMA (Laboratoire des Materiaux Avances-FRANCE) to the purpose of realizing these filters using the IBS (Ion Beam Sputtering) deposition technique. The results obtained with High-Pass/Low-Pass structures will be presented. Experimental results will be shown concerning the R-band filter (552-691 nm). An overview of the work to be done to realize transmittance map over large filters will be given.

Published
2013

18. Cryogenic measurements of mechanical loss of high-reflectivity coating and estimation of thermal noise

Author

J. H. Hough, Danièle Forest, Salim Otmani, N. Morgado, M. J. Hart, Christophe Michel, W. R. Cunningham, Sheila Rowan, J. Hennig, L. Pinard, Gianpietro Cagnoli, M. Granata, Ian MacLaren, I. W. Martin, Jerome Degallaix, Kieran Craig, Cécile Carcy, R. Flaminio, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, 010308 nuclear & particles physics, business.industry, High reflectivity, Spectral density, Absorption loss, Dielectric, engineering.material, Atmospheric temperature range, 01 natural sciences, Atomic and Molecular Physics, and Optics, Optics, Coating, 0103 physical sciences, Transmittance, engineering, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 010306 general physics, business
Abstract

We report on low-frequency measurements of the mechanical loss of a high-quality (transmissivity T

Published
2013

19. Development on Large Band-Pass Filters for the Wide Field Survey Telescope LSST

Author

Julien Teillon, R. Flaminio, Christophe Michel, L. Pinard, N. Morgado, and Benoit Sassolas

Subjects
Telescope, Engineering, Optics, Transmission (telecommunications), Band-pass filter, law, business.industry, business, Wide field, Refractive index, law.invention, Remote sensing
Abstract

LSST is a new kind of telescope with ambitious scientific objectives. Its optical design includes large bandpass filters with high optical requirements: in-band transmission higher than 95%, out-of-band transmission less than 0.01% and steep edges.

Published
2013

20. LSST camera optics design

Author

Martin Nordby, D. K. Gilmore, Vincent J. Riot, John Ku, Steve Pratuch, Christophe Michel, N. Morgado, P. Antilogus, R. Flaminio, Mike Foss, Lynn G. Seppala, Benoit Sassolas, Scot S. Olivier, and Brian J. Bauman

Subjects
Physics, Telescope, Cardinal point, Optics, law, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Physics::Optics, Astrophysics::Cosmology and Extragalactic Astrophysics, Large Synoptic Survey Telescope, business, Wide field, law.invention
Abstract

The Large Synoptic Survey Telescope (LSST) uses a novel, three-mirror, telescope design feeding a camera system that includes a set of broad-band filters and three refractive corrector lenses to produce a flat field at the focal plane with a wide field of view. Optical design of the camera lenses and filters is integrated in with the optical design of telescope mirrors to optimize performance. We discuss the rationale for the LSST camera optics design, describe the methodology for fabricating, coating, mounting and testing the lenses and filters, and present the results of detailed analyses demonstrating that the camera optics will meet their performance goals.

Published
2012

21. Towards the experimental demonstration of quantum radiation pressure noise

Author

Michael Bahriz, Rémy Braive, Thomas Antoni, Pierre-François Cohadon, L. Pinard, Alexios Beveratos, Tristan Briant, A. Tavernarakis, Isabelle Sagnes, Izo Abram, R. Flaminio, Slawomir Gras, C. Molinelli, Pierre Verlot, Christophe Michel, Antoine Heidmann, Aurélien Kuhn, Olivier Le Traon, Isabelle Robert-Philip, Laboratoire Kastler Brossel (LKB (Jussieu)), Université Pierre et Marie Curie - Paris 6 (UPMC)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), Mesures et Bruits Fondamentaux, Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), Laboratoire Matériaux et Phénomènes Quantiques (MPQ (UMR_7162)), Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), ONERA, Université Paris Saclay (COmUE) [Palaiseau], ONERA-Université Paris Saclay (COmUE), ONERA - The French Aerospace Lab [Châtillon], ONERA - The French Aerospace Lab [Palaiseau], Laboratoire de photonique et de nanostructures (LPN), Centre National de la Recherche Scientifique (CNRS), Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), ONERA, Université Paris Saclay [Palaiseau], ONERA-Université Paris-Saclay, and ONERA

Subjects
Physics, Quantum optics, [PHYS]Physics [physics], business.industry, Quantum noise, General Engineering, Shot noise, Energy Engineering and Power Technology, 01 natural sciences, 7. Clean energy, Noise (electronics), 010305 fluids & plasmas, Optics, Radiation pressure, 0103 physical sciences, Astronomical interferometer, Sensitivity (control systems), 010306 general physics, business, Quantum, ComputingMilieux_MISCELLANEOUS
Abstract

Quantum radiation pressure noise has never been experimentally demonstrated, though it has been predicted for more than thirty years. It is, however, expected to limit the low-frequency sensitivity of second generation gravitational-wave interferometers. We have demonstrated classical radiation-pressure-induced correlations between two optical beams sent into the same high-finesse cavity with a moving mirror. Our two-beam scheme can be used to retrieve quantum noise embedded in an overwhelming classical noise, and has applications both in high-sensitivity measurements and in quantum optics.

Published
2011

22. Twin mirrors for laser interferometric gravitational wave detectors

Author

Christophe Michel, J. Franc, R. Flaminio, Aline Lacoudre, L. Pinard, D. Forest, N. Morgado, Quentin Benoit, J.-L. Montorio, Massimo Galimberti, Benoit Sassolas, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics::Instrumentation and Detectors, Materials Science (miscellaneous), Physics::Optics, 02 engineering and technology, 01 natural sciences, Industrial and Manufacturing Engineering, law.invention, 010309 optics, General Relativity and Quantum Cosmology, Optics, law, Observatory, 0103 physical sciences, Light beam, Business and International Management, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Gravitational wave, Detector, Astrophysics::Instrumentation and Methods for Astrophysics, Michelson interferometer, 021001 nanoscience & nanotechnology, Laser, LIGO, Interferometry, 0210 nano-technology, business
Abstract

Gravitational-wave detectors such as Virgo and the laser interferometric gravitational-wave observatory (LIGO) use a long-baseline Michelson interferometer with Fabry–Perot cavities in the arms to search for gravitational waves. The symmetry between the two Fabry–Perot cavities is crucial to reduce the interferometer’s sensitivity to the laser amplitude and frequency noise. To this purpose, the transmittance of the mirrors in both cavities should be as close as possible. This paper describes the realization and the characterization of the first twin large low-loss mirrors with transmissions differing by less than 0.01%.

Published
2011

23. Measurement of thermal noise in multilayer coatings with optimized layer thickness

Author

A. E. Villar, Kenneth G. Libbrecht, Christophe Michel, Innocenzo M. Pinto, Vincenzo Pierro, Ilaria Taurasi, N. Morgado, Laurent Pinard, Eric D. Black, Vincenzo Galdi, Maria Ilaria Del Principe, Riccardo DeSalvo, Villar, A. E., Black, E. D., Desalvo, R., Libbrecht, K. G., Michel, C., Morgado, N., Pinard, L., Pinto, I. M., Pierro, V., Galdi, V., Principe, M., and Taurasi, I.

Subjects
Physics, Nuclear and High Energy Physics, 010308 nuclear & particles physics, business.industry, Detector, FOS: Physical sciences, General Relativity and Quantum Cosmology (gr-qc), engineering.material, 01 natural sciences, 7. Clean energy, Noise (electronics), General Relativity and Quantum Cosmology, Particle detector, Wavelength, Optics, Optical coating, Coating, 0103 physical sciences, engineering, Measuring instrument, Optoelectronics, 010306 general physics, business, Layer (electronics)
Abstract

A standard quarter-wavelength multilayer optical coating will produce the highest reflectivity for a given number of coating layers, but in general it will not yield the lowest thermal noise for a prescribed reflectivity. Coatings with the layer thicknesses optimized to minimize thermal noise could be useful in future generation interferometric gravitational wave detectors where coating thermal noise is expected to limit the sensitivity of the instrument. We present the results of direct measurements of the thermal noise of a standard quarter-wavelength coating and a low noise optimized coating. The measurements indicate a reduction in thermal noise in line with modeling predictions., 8 pages, 14 figures

Published
2010

24. Towards a new generation of low loss mirrors for the advanced gravitational waves interferometers

Author

R. Flaminio, J.-L. Montorio, Christophe Michel, L. Pinard, D. Forest, N. Morgado, Benoit Sassolas, and Aline Lacoudre

Subjects
Materials science, Gravitational wave, business.industry, engineering.material, Layer thickness, Laser interferometry, Interferometry, Optics, Coating, Astronomical interferometer, engineering, Thin film, Absorption (electromagnetic radiation), business
Abstract

New generation of advanced interferometer needs fused silica mirrors having better optical and mechanical properties. This paper describes the way to reduce the IBS coating absorption (1064 nm) and to improve the layer thickness uniformity.

Published
2010

25. A micromechanical resonator to reach the quantum regime

Author

Antoine Heidmann, R. Flaminio, Pierre-François Cohadon, L. Pinard, Michael Bahriz, O. Ducloux, C. Molinelli, S. Masson, Christophe Michel, Denis Janiaud, Aurélien Kuhn, Tristan Briant, O. Le Traon, Girod, Dominique, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Dielectric resonator antenna, Materials science, business.industry, Physics::Optics, 02 engineering and technology, Output coupler, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, law.invention, Resonator, Surface micromachining, Interferometry, Optics, law, [PHYS.PHYS.PHYS-INS-DET] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Q factor, 0103 physical sciences, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, 0210 nano-technology, business, Helical resonator, ComputingMilieux_MISCELLANEOUS
Abstract

We present a new micromechanical resonator designed for the observation of its quantum ground state (QGS). To reach QGS, a high frequency resonator with the lowest possible mass and the highest possible quality factor, coupled with an extremely sensitive measurement technique, has to be implemented. Using a high-finesse Fabry-Perot cavity with a mirror coated on the resonator, we expect benefits from the unique sensitivity of optical interferometry (10−38 m2/Hz) and from the optomechanical coupling between the light and the micro-resonator both to laser cool the resonator down to its ground state and to observe its residual quantum position fluctuations. We present the resonator we have developed for that purpose, which takes advantage from the high intrinsic quality factor of single crystal quartz and is designed to obtain a high resonance frequency (a few MHz) as well as a low mass (a few tens of µg). A length extension mode is used in order to avoid any deformation of the mirror surface and so to preserve the intrinsic quality factor of the resonator. A dedicated crystallographic orientation and a beam equilateral cross-section have been defined with respect to the quartz trigonal symmetry, allowing the micromachining of the resonator by wet etching. A beam cross-section area of 10−2 mm2 has been chosen to ease the deposit of the multilayered mirror. First mechanical characterizations of the resonator give a resonance frequency of 3.6 MHz, with a 25 µg mass and a quality factor of 390 000. Next steps will be the coating of the low-loss mirror on the resonator and its implementation in the Fabry-Perot cavity.

Published
2010

26. EUV near normal incidence collector development at SAGEM

Author

R. Mercier Ythier, Andre Rinchet, Benoit Sassolas, Jean-Marie Mackowski, Marie-Françoise Ravet-Krill, Christophe Michel, Roland Geyl, Laurent Pinard, Elodie Roméo, Xavier Bozec, R. Flaminio, Christophe Hecquet, N. Morgado, Franck Delmotte, J.-L. Montorio, SAGEM Défense Sécurité [Massy], Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), and Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, Computer cooling, business.industry, Extreme ultraviolet lithography, Polishing, 02 engineering and technology, Surface finish, 021001 nanoscience & nanotechnology, 7. Clean energy, 01 natural sciences, Design for manufacturability, 010309 optics, chemistry.chemical_compound, Optics, chemistry, Extreme ultraviolet, 0103 physical sciences, Water cooling, Silicon carbide, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS
Abstract

Through its participation to European programs, SAGEM has worked on the design and manufacturing of normal incidence collectors for EUV sources. By opposition to grazing incidence, normal incidence collectors are expected to collect more light with a simpler and cheaper design. Designs are presented for the two current types of existing sources: Discharge Produced Plasma (DPP) and Laser Produced Plasma (LPP). Collection efficiency is calculated in both cases. It is shown that these collectors can achieve about 10 % efficiency for DPP sources and 40 % for LPP sources. SAGEM works on the collectors manufacturability are also presented, including polishing, coating and cooling. The feasibility of polishing has been demonstrated with a roughness better than 2 angstroms obtained on several materials (glass, silicon, Silicon Carbide, metals...). SAGEM is currently working with the Institut d'Optique and the Laboratoire des Materiaux Avances on the design and the process of EUV coatings for large mirrors. Lastly, SAGEM has studied the design and feasibility of an efficient thermal control, based on a liquid cooling through slim channels machined close to the optical surface.

Published
2008

27. The BMV experiment : a novel apparatus to study the propagation of light in a transverse magnetic field

Author

Jacques Vigué, Benoit Pinto Da Souza, Carlo Rizzo, Laurent Pinard, Marc Nardone, Cécile Robilliard, Sebastien Batut, G. Trénec, Jean-Marie Mackowski, Christophe Michel, Oliver Portugall, Gilles Bailly, Remy Battesti, Geert L. J. A. Rikken, Laboratoire National des Champs Magnétiques Pulsés (LNCMP), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA), Interférométrie (LCAR), Laboratoire Collisions Agrégats Réactivité (LCAR), Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche sur les Systèmes Atomiques et Moléculaires Complexes (IRSAMC), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, business.industry, FOS: Physical sciences, 01 natural sciences, Atomic and Molecular Physics, and Optics, High Energy Physics - Experiment, Finesse, High Energy Physics - Experiment (hep-ex), Optics, Transverse magnetic field, Magnet, 0103 physical sciences, Current (fluid), 010306 general physics, business, Optics (physics.optics), Physics - Optics
Abstract

In this paper, we describe in detail the BMV (Bir\'efringence Magn\'etique du Vide) experiment, a novel apparatus to study the propagation of light in a transverse magnetic field. It is based on a very high finesse Fabry-Perot cavity and on pulsed magnets specially designed for this purpose. We justify our technical choices and we present the current status and perspectives., Comment: To be published in the European Physical Journal D

Published
2008

28. Experimental optomechanics with silicon micromirrors

Author

Lionel Rousseau, Pierre-François Cohadon, Tristan Briant, Olivier Français, Laurent Pinard, Olivier Arcizet, Jean-Marie Mackowski, Christophe Michel, Antoine Heidmann, C. Molinelli, Laboratoire Kastler Brossel (LKB (Jussieu)), Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Electronique, Systèmes de communication et Microsystèmes (ESYCOM), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris, Université Pierre et Marie Curie - Paris 6 (UPMC)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris-Conservatoire National des Arts et Métiers [CNAM] (CNAM)

Subjects
Silicon, Measure (physics), General Physics and Astronomy, chemistry.chemical_element, Physics::Optics, 02 engineering and technology, Dielectric, 7. Clean energy, 01 natural sciences, Noise (electronics), Resonator, Optics, 0103 physical sciences, [SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph], [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, Optomechanics, Quantum optics, Physics, business.industry, 021001 nanoscience & nanotechnology, chemistry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, Ground state
Abstract

We experimentally demonstrate the high-sensitivity optical monitoring of moving micromirrors, made of low-loss dielectric coatings upon silicon resonators of various shapes and sizes. The very high optical finesses obtained (\mathcal{F}\simeq 30\,000 ) have allowed us to measure the thermal noise of the micromirrors at room temperature with a shot-noise limited sensitivity at the 10^{-19}\,{\rm m}/\sqrt{\rm Hz} level and to completely characterize their mechanical behavior, in excellent agreement with the results of a finite-element computation. Applications of such optomechanical systems range from quantum optics experiments to the experimental demonstration of the quantum ground state of a macroscopic mechanical resonator.

Published
2008

29. Perception visuelle du mouvement. Etude Normative

Author

Christophe Mermound, Theodor Landis, Fabienne Losey, Avinoam B. Safran, and Christophe Michel

Subjects
Visual search, Visual perception, Orientation (computer vision), Computer science, business.industry, media_common.quotation_subject, Motion (physics), Ophthalmology, Optics, Perception, Computer vision, Motion perception, Artificial intelligence, business, Depth perception, media_common, Cardinal direction
Abstract

Background A battery of tests has been developed to better define the variety of defects which can occur in the process of visual perception of motion. Methods The tests assessed the perception of 1) coherent motion, in each of the four cardinal directions; (2) form from motion; (3) flow in depth; and (4) motion of a target moving in depth, within or without an optic flow surround. A normative study was conducted with 34 subjects, 21 to 69 years of age. Results Recognition of form from motion was better with upwards than with downwards motion. Perception of motion in depth was better with backward than forwards motion. The presence of an optic flow altered the perception of a motion in depth. Conclusion The recognition of form from motion demonstrated an asymmetry in threshold between the upward and downward movements. This asymmetry did not occur with global coherent motion, thus reflecting the variety of mechanisms involved in the visual process of motion. Moreover, alteration of perception of motion in depth within an optic flow reflected background effect.

Published
1998

30. Original optical metrologies of large components

Author

B. Lagrange, Renée Pignard, Bernard Cimma, Alban Remillieux, J.-L. Montorio, P. Ganau, N. Morgado, Christophe Michel, Laurent Pinard, Danielle Forest, Jean-Marie Mackowski, Girod, Dominique, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Materials science, Optical metrology, stitching interferometry, Surface finish, [SDU.ASTR] Sciences of the Universe [physics]/Astrophysics [astro-ph], 01 natural sciences, 010309 optics, Image stitching, [PHYS.ASTR.CO]Physics [physics]/Astrophysics [astro-ph]/Cosmology and Extra-Galactic Astrophysics [astro-ph.CO], Optics, 0103 physical sciences, Astronomical interferometer, Calibration, 010306 general physics, roughness, [SDU.ASTR]Sciences of the Universe [physics]/Astrophysics [astro-ph], birefringence, business.industry, scattering, Metrology, Interferometry, [PHYS.ASTR.CO] Physics [physics]/Astrophysics [astro-ph]/Cosmology and Extra-Galactic Astrophysics [astro-ph.CO], Profilometer, Spatial frequency, business, absorption
Abstract

présentée par A. Remillieux; The coating deposition on large optical components (diameter 350 mm) has required the development of new metrology tools at 1064 nm. To give realistic values of the optical performances, the whole surface of the component needs to be scanned. Our scatterometer (commercial system) has been upgraded to support large and heavy samples. The other metrology tools are prototypes we have developed. We can mention the absorption (photothermal effect) and birefringence bench, a control interferometer equipped with an original stitching option, the optical profilometer (RMS roughness and small defect measurements). A detailed description of these metrology benches will be exposed. Their sensitivity, accuracy and capability to map the optical properties of substrates or mirrors will be discussed. We will describe the recent developments: the stitching option adapted to the Micromap profilometer to measure the RMS roughness on larger area (exploration of a new spatial frequency domain), the accurate bulk absorption calibration.

Published
2004

31. I.B.S. coatings on large substrates: Towards an improvement of the mechanical and optical performances

Author

Jean-Luc Montorio, Alban Remillieux, Bernard Lagrange, P. Ganau, Danièle Forest, Renée Pignard, N. Morgado, Laurent Pinard, Jean-Marie Mackowski, Christophe Michel, Girod, Dominique, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Wavefront, [PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Scattering, Virgo interferometer, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Optics, Phase shifting interferometry, [PHYS.PHYS.PHYS-INS-DET] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Q factor, 0103 physical sciences, Optoelectronics, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Thin film, 0210 nano-technology, business, Absorption (electromagnetic radiation)
Abstract

présenté par A. Remillieux; Large mirrors (350 mm), having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new mirror generation needs better wavefront and lower mechanical loss. The first results are discussed.

Published
2004

32. Large mirror surface control by corrective coating

Author

L. Pinard, Frédérique Marion, B. Lagrange, R. Flaminio, Pierre Mugnier, Laurent Giacobone, E. Pacaud, B. Mours, Christophe Michel, Romain Bonnand, Jerome Degallaix, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Laboratoire d'Annecy de Physique des Particules (LAPP), Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Physics, [PHYS.ASTR.IM]Physics [physics]/Astrophysics [astro-ph]/Instrumentation and Methods for Astrophysic [astro-ph.IM], Gravitational-wave observatory, Physics and Astronomy (miscellaneous), 010308 nuclear & particles physics, business.industry, Flatness (systems theory), Polishing, engineering.material, 01 natural sciences, LIGO, [SDU.ASTR.IM]Sciences of the Universe [physics]/Astrophysics [astro-ph]/Instrumentation and Methods for Astrophysic [astro-ph.IM], Surface coating, Interferometry, Optics, Coating, 0103 physical sciences, [PHYS.GRQC]Physics [physics]/General Relativity and Quantum Cosmology [gr-qc], engineering, Astronomical interferometer, business, 010303 astronomy & astrophysics
Abstract

The Advanced Virgo gravitational wave detector aims at a sensitivity ten times better than the initial LIGO and Virgo detectors. This implies very stringent requirement on the optical losses in the interferometer arm cavities. In this paper we focus on the mirrors which form the interferometer arm cavities and that require a surface figure error to be well below one nanometre on a diameter of 150 mm. This 'sub-nanometric flatness' is not achievable by classical polishing on such a large diameter. Therefore we present the corrective coating technique which has been developed to reach this requirement. Its principle is to add a non-uniform thin film on top of the substrate in order to flatten its surface. In this paper we will introduce the Advanced Virgo requirements and present the basic principle of the corrective coating technique. Then we show the results obtained experimentally on an initial Virgo substrate. Finally we provide an evaluation of the round-trip losses in the Fabry-Perot arm cavities once the corrected surface is used.

Published
2013

33. The new cryogenic facility at LMA

Author

Quentin Benoit, R. Flaminio, Danièle Forest, B. Lagrange, Kevin Gautier, N. Morgado, Janyce Franc, E. Saracco, Jerome Degallaix, Christophe Michel, Laurent Pinard, and M. Granata

Subjects
Physics, Cryostat, History, Physics::Instrumentation and Detectors, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Control equipment, engineering.material, Third generation, Particle detector, Computer Science Applications, Education, Optics, Coating, Astronomical interferometer, Measuring instrument, engineering, Physics::Accelerator Physics, Absorption (electromagnetic radiation), business
Abstract

To support the research effort for the third generation of gravitational wave interferometers, the Laboratoire des Materiaux Avances (LMA) at Lyon, France has developed a new cryogenic facility to characterize optics at low temperature. The new cryostat is installed in a clean room and allows samples to be cooled down to 10 Kelvin in around 12 hours. Currently, two independent experiments have been installed in the cryostat: the measure of the optical absorption of silicon and the measurement of the coating mechanical loss. After a short presentation of the cryogenic and optical setup, preliminary results from the optical absorption experiment will be presented.

Published
2012

34. Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

Author

Renée Pignard, B. Lagrange, Danièle Forest, P. Ganau, N. Morgado, Alban Remillieux, Laurent Pinard, J.-L. Montorio, Bernard Cimma, Jean-Marie Mackowski, Christophe Michel, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO

Subjects
Materials science, Materials Science (miscellaneous), Virgo interferometer, engineering.material, Optics at surfaces : Thin films, 01 natural sciences, Industrial and Manufacturing Engineering, 010309 optics, chemistry.chemical_compound, Optics, Coating, 0103 physical sciences, Tantalum pentoxide, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Materials : Optical materials, Business and International Management, Thin film, Absorption (electromagnetic radiation), Wavefront, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], 010308 nuclear & particles physics, business.industry, Scattering, Instrumentation measurement and metrology : Interferometry, Interferometry, chemistry, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], engineering, business
Abstract

Large mirrors (∅350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.

Published
2006

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