1. Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide
- Author
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Lee Kian Ng, Muhamad Khairi Bin Safari, Ranganathan Nagarajan, and Praveen Kumar Sampath
- Subjects
Materials science ,business.industry ,fungi ,technology, industry, and agriculture ,General Engineering ,Process (computing) ,Silicon on insulator ,macromolecular substances ,Buried oxide ,Notching ,stomatognathic system ,Etching (microfabrication) ,Electronic engineering ,Deep reactive-ion etching ,Optoelectronics ,Wafer ,Reduction (mathematics) ,business - Abstract
A novel two step etch process using the Bosch-etch mechanism to prevent notching on an SOI wafer is presented. The first etch step is used to attain the maximum etch depth with high etch rate and stop before the buried oxide (BOX). Followed by the second etch step with lower etch rate and tuned to soft land on the BOX to etch the remaining depth. In addition to that it is tailored to also provide a tapered etch profile which is beneficial in reducing the notch if over etching occurs.
- Published
- 2011