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Your search keyword '"Burton, R. S."' showing total 3 results
Start Over Author "Burton, R. S." Topic oxygen
3 results on '"Burton, R. S."'

2. Wet thermal oxidation of AlxGa1-xAs compounds.

Author

Burton, R. S. and Schlesinger, T. E.

Subjects
*OXIDATION, *COMPLEX compounds, *SEMICONDUCTORS, *OXYGEN
Abstract

Focuses on a study on the thermal oxidation of Al[subx]Ga[1-x]As compounds. Introduction to metal-insulator-semiconductor structures; Experimental setup; Details on the effects of oxygen.

Published
1994
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3. High-performance diffusion disordered AlxGa1-xAs lasers via a self-aligned process and conventional open-tube annealing.

Author

Burton, R. S., Schlesinger, T. E., Holmgren, D. J., Smith, S. C., and Burnham, R. D.

Subjects
*DIFFUSION, *SILICON, *OXYGEN
Abstract

Deals with high-performance diffusion disordered Al[subx]Ga[sub1-x]As lasers via a self-aligned process and conventional open-tube annealing. Details of the experimental techniques used; Discussion on silicon-oxygen diffusion observations.

Published
1993
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