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We have used a mesh experiment in order to measure the sub-pixel structure of the EPIC MOS CCDs on-board the XMM/NEWTON satellite. The EPIC MOS CCDs have 40 $\mu$m-square pixels which have an open electrode structure in order to improve the detection efficiency for low-energy X-rays. We obtained restored pixel images for various X-ray event grades (e.g. split-pixel events, single pixel events, etc.) at various X-ray energies. We confirmed that the open electrode structure results in a distorted horizontal pixel boundary. The open electrode region generates both single pixel events and vertically split events, but no horizontally split events. Because the single pixel events usually show the best energy resolution, we discuss a method of increasing the fraction of single pixel events from the open electrode region. Furthermore, we have directly measured the thickness of the electrodes and dead-layers by comparing spectra from the open electrode region with those from the other regions: electrodes, electrode finger and channel stop. We can say that EPIC MOS CCDs are more radiation hard than front-illumination chips of ACIS on-board Chandra X-ray Observatory because of their extra absorption thickness above the charge transfer channel. We calcurated the mean pixel response and found that our estimation has a good agreement with that of the ground calibration of EPIC MOS CCD., Comment: 20pages including 2 tables, 10 figures,Accepted for publication in : Nuclear Instruments and Methods in Physics Research A

We report here the results of a mesh experiment to measure the subpixel structure of the EPIC MOS CCDs on board the XMM X-ray observatory. The pixel size is 40$\mu$m square while the mesh hole spacing is 48$\mu$m, a combination quite different from our standard mesh experiment. We have verified that this combination functions properly and have analyzed the CCD structure with sub-pixel resolution. The EPIC MOS CCD has an open electrode structure to improve detection efficiency at low energies. We obtained the distribution of various grades of X-ray events inside the pixel. A horizontally split two-pixel event is generated near the channel stop which forms a straight vertical pixel boundary whereas a vertically split two-pixel event is generated where the potential due to the thinned gate structure forms a wavy horizontal pixel boundary. Therefore, the effective pixel shape is not a square but is distorted. The distribution of X-ray events clearly shows that the two etched regions in each pixel, separated by the bridging finger of the enlarged (open) electrode. We measured the difference in X-ray transmission between the conventional and open regions of the pixel using O-K and Cu-L X-ray emission lines, and found it to be consistent with an electrode thickness comprising $0.2\pm0.1\mu$m of Si and $0.6\pm0.2\mu$m of SiO2., Comment: 9 pages, 5 figures, accepted for publication in Nucl. Instr. and Methods A