1. Piezoelectric thin films for MEMS.
- Author
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Kanno, Isaku, Ouyang, Jun, Akedo, Jun, Yoshimura, Takeshi, Malič, Barbara, and Muralt, Paul
- Subjects
PIEZOELECTRIC thin films ,THICK films ,OXIDE coating ,ACOUSTIC surface waves ,PIEZOELECTRIC materials ,THIN films ,MEMS resonators - Abstract
Piezoelectric materials have excellent energy conversion efficiency between mechanical and electrical domains and have been used in a variety of electromechanical devices. These technologies include new piezoelectric thin-film materials, innovative thin-film processes, and new evaluation methods with the goal of advancing the piezo-MEMS applications. Evolving around the development of piezo-MEMS are interdisciplinary and intertwined technologies, including materials science, surface and thin-film processes, measurement and device technologies, etc. This APL Special Topic "Piezoelectric thin films for MEMS" features recent advances in piezoelectric thin films and related technologies aimed for MEMS applications. [Extracted from the article]
- Published
- 2023
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