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In our work, the model of self-consistent electron–deformation–diffusion effects in thin films grown on substrate with the mismatch of lattice parameters of the contacting materials is constructed. The proposed theory self-consistently takes into account the interaction of the elastic field (created by the mismatch of lattice parameters of the film and the substrate, and point defects) with the diffusion processes of point defects and the electron subsystem of semiconductor film. Within the framework of the developed model, the spatial distribution of deformation, concentration of defects, conduction electrons and electric field intensity is investigated, depending on the value of the mismatch, the type of defects, the average concentrations of point defects and conduction electrons. It is established that the coordinate dependence of deformation and the concentration profile of defects of the type of stretching (compression) centers, along the axis of growth of the strained film, have a non-monotonic character with minima (maxima), the positions of which are determined by the average concentration of point defects. It is shown that due to the electron–deformation interaction in film with a lattice parameter mismatch, the spatial redistribution of conduction electrons is observed and n-n+ transitions can occur. Information about the self-consistent spatial redistribution of point defects, electrons and deformation of the crystal lattice in semiconductor materials is necessary for understanding the problems of their stability and degradation of nano-optoelectronic devices operating under conditions of intense irradiation. [ABSTRACT FROM AUTHOR]