1. Generalized Linear Model-based Control Charts for Discrete Semiconductor Process Data.
- Author
-
Skinner, Katina R., Montgomery, Douglas C., and Runger, George C.
- Subjects
LINEAR statistical models ,MATHEMATICAL models ,QUALITY control charts ,SEMICONDUCTORS ,MULTIVARIATE analysis - Abstract
In previous simple cases generalized linear model (GLM)-based control charts have been shown to be very effective in detecting shifts in multivariate counts when input variables are measurable. This paper studies the effectiveness of GLM-based control charts on more complicated data sets with multiple inputs and outputs whose relationships are varied. Results show that the GLM-based charts were most effective in detecting changes in the means of overdispersed counts (when compared with counts with normal dispersion). The GLM-based charts were more effective than multiple C charts in detecting changes in the means of counts when multiple complicated relationships exist. Copyright © 2004 John Wiley & Sons, Ltd. [ABSTRACT FROM AUTHOR]
- Published
- 2004
- Full Text
- View/download PDF