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Herein, we investigate the temperature compensation for a dual-mass MEMS gyroscope. After introducing and simulating the dual-mass MEMS gyroscope's working modes, we propose a hybrid algorithm for temperature compensation relying on improved complete ensemble empirical mode decomposition with adaptive noise (ICEEMDAN), sample entropy, time–frequency peak filtering, non-dominated sorting genetic algorithm-II (NSGA II) and extreme learning machine. Firstly, we use ICEEMDAN to decompose the gyroscope's output signal, and then we use sample entropy to classify the decomposed signals. For noise segments and mixed segments with different levels of noise, we use time–frequency peak filtering with different window lengths to achieve a trade-off between noise removal and signal retention. For the feature segment with temperature drift, we build a compensation model using extreme learning machine. To improve the compensation accuracy, NSGA II is used to optimize extreme learning machine, with the prediction error and the 2-norm of the output-layer connection weight as the optimization objectives. Enormous simulation experiments prove the excellent performance of our proposed scheme, which can achieve trade-offs in signal decomposition, classification, denoising and compensation. The improvement in the compensated gyroscope's output signal is analyzed based on Allen variance; its angle random walk is decreased from 0.531076°/h/√Hz to 6.65894 × 10−3°/h/√Hz and its bias stability is decreased from 32.7364°/h to 0.259247°/h. [ABSTRACT FROM AUTHOR]

MEMS accelerometers are significantly impacted by temperature and noise, leading to a considerable compromise in their accuracy. In response to this challenge, we propose a parallel denoising and temperature compensation fusion algorithm for MEMS accelerometers based on RLMD-SE-TFPF and GRU-attention. Firstly, we utilize robust local mean decomposition (RLMD) to decompose the output signal of the accelerometer into a series of product function (PF) signals and a residual signal. Secondly, we employ sample entropy (SE) to classify the decomposed signals, categorizing them into noise segments, mixed segments, and temperature drift segments. Next, we utilize the time-frequency peak filtering (TFPF) algorithm with varying window lengths to separately denoise the noise and mixed signal segments, enabling subsequent signal reconstruction and training. Considering the strong inertia of the temperature signal, we innovatively introduce the accelerometer's output time series as the model input when training the temperature compensation model. We incorporate gated recurrent unit (GRU) and attention modules, proposing a novel GRU-MLP-attention model (GMAN) architecture. Simulation experiments demonstrate the effectiveness of our proposed fusion algorithm. After processing the accelerometer output signal through the RLMD-SE-TFPF denoising algorithm and the GMAN temperature drift compensation model, the acceleration random walk is reduced by 96.11 % , with values of 0.23032 g/h / Hz for the original accelerometer output signal and 0.00895695 g/h / Hz for the processed signal. [ABSTRACT FROM AUTHOR]

This paper presents an improved empirical modal decomposition (EMD) method to eliminate the influence of the external environment, accurately compensate for the temperature drift of MEMS gyroscopes, and improve their accuracy. This new fusion algorithm combines empirical mode decomposition (EMD), a radial basis function neural network (RBF NN), a genetic algorithm (GA), and a Kalman filter (KF). First, the working principle of a newly designed four-mass vibration MEMS gyroscope (FMVMG) structure is given. The specific dimensions of the FMVMG are also given through calculation. Second, finite element analysis is carried out. The simulation results show that the FMVMG has two working modes: a driving mode and a sensing mode. The resonant frequency of the driving mode is 30,740 Hz, and the resonant frequency of the sensing mode is 30,886 Hz. The frequency separation between the two modes is 146 Hz. Moreover, a temperature experiment is performed to record the output value of the FMVMG, and the proposed fusion algorithm is used to analyse and optimise the output value of the FMVMG. The processing results show that the EMD-based RBF NN+GA+KF fusion algorithm can compensate for the temperature drift of the FMVMG effectively. The final result indicates that the random walk is reduced from 99.608°/h/Hz1/2 to 0.967814°/h/Hz1/2, and the bias stability is decreased from 34.66°/h to 3.589°/h. This result shows that the algorithm has strong adaptability to temperature changes, and its performance is significantly better than that of an RBF NN and EMD in compensating for the FMVMG temperature drift and eliminating the effect of temperature changes. [ABSTRACT FROM AUTHOR]

Purpose: To reduce the influence of temperature on MEMS gyroscope, this paper aims to propose a temperature drift compensation method based on variational modal decomposition (VMD), time-frequency peak filter (TFPF), mind evolutionary algorithm (MEA) and BP neural network. Design/methodology/approach: First, VMD decomposes gyro's temperature drift sequence to obtain multiple intrinsic mode functions (IMF) with different center frequencies and then Sample entropy calculates, according to the complexity of the signals, they are divided into three categories, namely, noise signals, mixed signals and temperature drift signals. Then, TFPF denoises the mixed-signal, the noise signal is directly removed and the denoised sub-sequence is reconstructed, which is used as training data to train the MEA optimized BP to obtain a temperature drift compensation model. Finally, the gyro's temperature characteristic sequence is processed by the trained model. Findings: The experimental result proved the superiority of this method, the bias stability value of the compensation signal is 1.279 × 10–3°/h and the angular velocity random walk value is 2.132 × 10–5°/h/vHz, which is improved compared to the 3.361°/h and 1.673 × 10–2°/h/vHz of the original output signal of the gyro. Originality/value: This study proposes a multi-dimensional processing method, which treats different noises separately, effectively protects the low-frequency characteristics and provides a high-precision training set for drift modeling. TFPF can be optimized by SEVMD parallel processing in reducing noise and retaining static characteristics, MEA algorithm can search for better threshold and connection weight of BP network and improve the model's compensation effect. [ABSTRACT FROM AUTHOR]

In recent years, High-G MEMS accelerometers have been widely used in aviation, medicine, and other fields. So it is extremely important to improve the accuracy and performance of High-G MEMS accelerometers. For this purpose, we propose a fusion algorithm that combines EMD, wavelet thresholding, and temperature compensation to process measurement data from a High-G MEMS accelerometer. In the fusion algorithm, the original accelerometer signal is first decomposed by EMD to obtain the intrinsic mode function (IMF). Then, sample entropy (SE) is used to divide the IMF components into three segments. The noise segment is directly omitted, wavelet thresholding is performed on the mixing segment, and a GA-BP performs temperature compensation on the drift segment. Finally, signal reconstruction is implemented. Later, a comparative analysis is carried out on the results from four models: EMD, wavelet thresholding, EMD + wavelet thresholding, and EMD + wavelet thresholding + temperature compensation. The experimental data show that the acceleration random walk change from 1712.66 g/h/Hz0.5 to 79.15 g/h/Hz0.5 and the zero-deviation stability change from 49275 g/h to 774.7 g/h. This indicates that the fusion algorithm (EMD + wavelet thresholding + temperature compensation) not only effectively suppresses the noise of high-frequency components but also compensates for temperature drift in the accelerometer. [ABSTRACT FROM AUTHOR]

In this paper, the method for compensating the temperature drift of high-G MEMS accelerometer (HGMA) is proposed, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), RBF NN based on GA with Kalman filter (KF), and the RBF NN + GA + KF method compensated by the temperature drift model. First, this paper introduces an HGMA structure working principle, conducts a finite element analysis, and produces the results. The simulation results show that the HGMA working mode is the 1st order mode, and its resonant frequency is 408 kHz. The 2nd order mode resonant frequency is 667 kHz, and the gap with the first mode is 260 kHz, indicating that the coupling movement between the two modes is tiny, so the HGMA has good linearity. Then, a temperature experiment is performed to obtain the output value of HGMA. The output values of HGMA are analyzed and optimized by using the algorithms proposed in this paper. The processing results show that the RBF NN + GA + KF method compensated by the temperature drift model achieves the best denoing consequent. The processing results show that the temperature drift of the HGMA is effectively compensated. The final results show that acceleration random walking improved from 17130 g/h/Hz0.5 to 765.3 g/h/Hz0.5, and bias stability improved from 4720 g/h to 57.27 g/h, respectively. The results show that after using the RBF NN + GA + KF method, combined with the temperature drift model, the temperature drift trend and noise characteristics of HGMA are well optimized. [ABSTRACT FROM AUTHOR]

To eliminate the noise and temperature drift in an Micro-Electro-Mechanical Systems (MEMS) gyroscope's output signal for improving measurement accuracy, a parallel processing model based on Multi-objective particle swarm optimization based on variational modal decomposition-time-frequency peak filter (MOVMD–TFPF) and Beetle antennae search algorithm- Elman neural network (BAS–Elman NN) is established. Firstly, variational mode decomposition (VMD) is optimized by multi-objective particle swarm optimization (MOPSO); then, the best decomposition parameters [kbest,abest] can be obtained. Secondly, the gyroscope output signals are decomposed by VMD optimized by MOPSO (MOVMD); then, the intrinsic mode functions (IMFs) obtained after decomposition are classified into a noise segment, mixed segment, and drift segment by sample entropy (SE). According to the idea of a parallel model, the noise segment can be discarded directly, the mixed segment is denoised by time-frequency peak filtering (TFPF), and the drift segment is compensated at the same time. In the compensation part, the beetle antennae search algorithm (BAS) is adopted to optimize the network parameters of the Elman neural network (Elman NN). Subsequently, the double-input/single-output temperature compensation model based on the BAS-Elman NN is established to compensate the drift segment, and these processed segments are reconstructed to form the final gyroscope output signal. Experimental results demonstrate the superiority of this parallel processing model; the angle random walk of the compensated gyroscope output is decreased from 0.531076 to 5.22502 × 10−3°/h/√Hz, and its bias stability is decreased from 32.7364°/h to 0.140403°/h, respectively. [ABSTRACT FROM AUTHOR]

For the sake of decreasing the effects of noise and temperature error on the measurement accuracy of micro-electro-mechanical system (MEMS) gyroscopes, a denoising and temperature drift compensation parallel model method based on wavelet transform and forward linear prediction (WFLP) and support vector regression based on the cuckoo search algorithm (CS-SVR) is proposed in this paper. First, variational mode decomposition (VMD) is proposed in this paper, which is aimed at dividing the output signal of the gyroscope into intrinsic mode functions (IMFs); then, the IMFs are classified into three features—drift, mixed, and pure noise features—by the sample entropy (SE) value. Second, a wavelet transform and forward linear prediction (WFLP) are combined to remove the noise from the mixed features. Meanwhile, the drift feature is compensated by support vector regression based on the cuckoo search algorithm (CS-SVR). Finally, through reconstruction, the final signal is obtained. Experimental results demonstrate that the VMD-SE-WFLP-CS-SVR method proposed in this paper can decrease noise and compensate the temperature error effectively (angular random walking value is optimized from 1.667°/√h to 0.0667°/√h and the bias stability is reduced from 30°/h to 4°/h). In terms of denoising, the performance of the WFLP algorithm is superior to the wavelet threshold and FLP, as it combines their advantages; furthermore, in terms of temperature compensation, the proposed CS-SVR algorithm uses the cuckoo search algorithm to find the optimal parameters of SVR, improving the accuracy of the model. [ABSTRACT FROM AUTHOR]

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively. [ABSTRACT FROM AUTHOR]