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Silicon based power micro-electro-mechanical system (MEMS) applications require high-speed microrotating machinery operating stably over a large range of operating conditions. The technical barriers to achieving stable high-speed operation with micro-gas-bearings are governed by (1) stringent fabrication tolerance requirements and manufacturing repeatability, (2) structural integrity of the silicon rotors, (3) rotordynamic coupling effects due to leakage flows, (4) bearing losses and power requirements, and (5) transcritical operation and whirl instability issues. To enable high-power density the micro-turbomachinery must be run at tip speeds comparable to conventional scale turbomachinery. The rotors of the micro-gas turbines are supported by hydrostatic gas journal and hydrostatic gas thrust bearings. Dictated by fabrication constraints the location of the gas journal bearings is at the outer periphery of the rotor The high bearing surface speeds (target nearly 10 x [10.sup.6] mm rpm), the very low bearing aspect ratios (L/D

The high-speed microhydrostatic gas journal bearings used in the high-power density MIT microengines are of very low aspect ratio with an L/D of less than 0.1 and are running at surface speeds of order 500 m/s. These ultra-short high-speed bearings exhibit whirl instability limits and a dynamic behavior much different from conventional hydrostatic gas bearings. The design space for stable high-speed operation is confined to a narrow region and involves singular behavior (Spakovszky and Liu, 2005, 'Scaling Laws for Ultra-Short Hydrostatic Gas Journal Bearings,' ASME J. Vibr. Acoust., 127(3), pp. 254-261). This together with the limits on achievable fabrication tolerance, which can be achieved in the silicon chip manufacturing technology, severely affects bearing operability and limits the maximum achievable speeds of the microturbomachinery. This paper introduces a novel variation of the axial-flow hydrostatic micro gas journal bearing concept, which yields anisotropy in bearing stiffness. By departing from axial symmetry and introducing biaxial symmetry in hydrostatic stiffness, the bearing 's top speed is increased and fabrication tolerance requirements are substantially relieved making more feasible extended stable high-speed bearing operation. The objectives of this work are: (i) to characterize the underlying physical mechanisms and the dynamic behavior of this novel bearing concept and (ii) to report on the design, implementation, and test of this new microbearing technology. The technical approach involves the combination of numerical simulations, experiment, and simple, first-principles-based modeling of the gas bearing flow field and the rotordynamics. A simple description of the whirl instability threshold with stiffness anisotropy is derived explaining the instability mechanisms and linking the governing parameters to the whirl ratio and stability limit. An existing analytical hydrostatic gas bearing model is extended and modified to guide the bearing design with stiffness anisotropy. Numerical simulations of the full nonlinear governing equations are conducted to validate the theory and the novel bearing concept. Experimental results obtained from a microbearing test device are presented and show good agreement between the theory and the measurements. The theoretical increase in achievable bearing top speed and the relief in fabrication tolerance requirements due to stiffness anisotropy are quantified and important design implications and guidelines for micro gas journal bearings are discussed. [DOI: 10.1115/1.2180813]

The journal bearings of the MIT micro-devices are located at the outer periphery of the rotor and are designed to operate at rotational speeds of order two million rpm in order to enable high-power densities with turbomachinery tip speeds near 500 m/s. These journal bearings are very short compared to their relatively large bearing diameters such that the bearing L/D is typically less than 0.1, that is at least one order of magnitude smaller than in conventional gas bearings. Thus, the ultra-short micro gas journal bearings essentially act as short annular seals and operate at Reynolds numbers of order 300, two orders of magnitude lower than conventional annular seals. The concepts that hold for turbulent flow, large scale annular seals do not apply to micro bearings and the laminar flow regime sets new challenges in the design, implementation and operation of ultra-short, high-speed gas bearings. In order to reach the goal of operating the MIT micro devices at full design speed, the micro-bearing design must be improved and engineering solutions need to be found to overcome the challenges of high-speed bearing operation. This paper is the first to derive the scaling laws for the dynamics of ultra-short hydrostatic gas journal bearings. The theory is established from first principles and enables a physics based characterization of the dynamic behavior of ultra-short hydrostatic gas bearings. The derived scaling laws for natural frequency and damping ratio show good agreement with experimental data. A simple criterion for whirl instability is found that only depends on bearing geometry. The scaling laws together with this criterion are used to delineate engineering solutions critical for stable high-speed bearing operation. Design charts are developed which provide the link between fabrication tolerances, bearing performance, and the tolerable level of rotor unbalance for a minimum required whirl ratio.

Several years ago an effort was undertaken at MIT to develop high-speed rotating MEMS (Micro Electro-Mechanical Systems) using computer chip fabrication technology. To enable high-power density the micro-turbomachinery must be run at tip speeds of order 500 m/s, comparable to conventional scale turbomachinery. The high rotating speeds (of order 2 million rpm), the relatively low bearing aspect ratios (L/D