Search

Single-crystal silicon carbide has excellent electrical, mechanical, and chemical properties. However, due to its high hardness material properties, achieving high-precision manufacturing of single-crystal silicon carbide with an ultra-smooth surface is difficult. In this work, quantum dots were introduced as a sacrificial layer in polishing for pulsed-ion-beam sputtering of single-crystal SiC. The surface of single-crystal silicon carbide with a quantum-dot sacrificial layer was sputtered using a pulsed-ion beam and compared with the surface of single-crystal silicon carbide sputtered directly. The surface roughness evolution of single-crystal silicon carbide etched using a pulsed ion beam was studied, and the mechanism of sacrificial layer sputtering was analyzed theoretically. The results show that direct sputtering of single-crystal silicon carbide will deteriorate the surface quality. On the contrary, the surface roughness of single-crystal silicon carbide with a quantum-dot sacrificial layer added using pulsed-ion-beam sputtering was effectively suppressed, the surface shape accuracy of the Ø120 mm sample was converged to 7.63 nm RMS, and the roughness was reduced to 0.21 nm RMS. Therefore, the single-crystal silicon carbide with the quantum-dot sacrificial layer added via pulsed-ion-beam sputtering can effectively reduce the micro-morphology roughness phenomenon caused by ion-beam sputtering, and it is expected to realize the manufacture of a high-precision ultra-smooth surface of single-crystal silicon carbide. [ABSTRACT FROM AUTHOR]

When fabricating optical cantilever parts with single-point diamond turning (SPDT) technique, chatter phenomenon happens and degenerates the surface quality. This paper studies the chatter phenomenon and proposes a scheme to solve the problem. A kind of viscoelastic material is presented as the auxiliary supporter under the vibration location of optical cantilever parts to suppress chatter. Mirror surfaces can be generated and surface shape can be maintained after uninstalling the supporter because of the special features of viscoelastic material which acts like solid to enhance the rigidity of the cantilevers when cutting forces act on it and acts like liquid to avoid distortion of the surface shape during setting and unsetting the supporter. The effect of the viscoelastic material is discussed by virtue of finite element simulation on the basis of elasticity theory. Cutting experiments are carried out and the cutting forces as well as the surface quality with and without viscoelastic supporter are compared. The results show that chatter is suppressed effectively by using viscoelastic supporter, and surface roughness average (Ra) of around 5 nm is obtained on the whole surface with no obvious distortion on machined surface shape. [ABSTRACT FROM AUTHOR]

Abstract: Single point diamond face flycutting technique is widely applied to fabricate potassium dihydrogen phosphate (KDP) crystals because of their characteristics of softness, brittleness, deliquescence and anisotropy. This paper studies the feasibility of machining KDP crystals through spiral turning method based on the ductile cutting mechanism of brittle materials. The spiral scratch method is employed to analyze various conditions of achieving brittle–ductile transition in different cutting directions where the critical depth of cut is obtained. The cutting forces and surface formation processes within different cutting parameters are discussed and the parameters ensuring full-aperture ductile turning are acquired. White light interferometer and Atomic Force Microscope (AFM) are used to evaluate the coherence of machined surface qualities in different cutting directions. The results indicate that the critical depth of cut varies from cutting directions significantly and fluctuates from about 200nm to 1000nm under the experimental condition. Cutting forces display periodical variation with the change of cutting direction and the periodical trend blurs, even ultimately disappears, with the decrease of the cutting parameters. Root-Mean-Square (RMS) value of the fabricated surface roughness fluctuates from 1.3nm to 1.7nm on the whole surface with no distinct anisotropic distribution of the surface morphology according to the results observed by AFM. Compared with face flycutting method, spiral turning method has capability to generate complex surface profiles such as aspheric or freeform surfaces and can also be used to compensate the deformation error of KDP crystals caused by vacuum suction during fabrication. [Copyright &y& Elsevier]

Single-crystal silicon is an important material in the high precision reflector, and its processing quality directly affects the overall performance index of the reflector. Aiming at the problem of "comet tail" defect produced by the magnetorheological machining process, the process parameters are controlled by the combination of experiments and simulations, and the surface roughness changes after different scanning speeds under the same removal depth are compared and analyzed. The results show that under the same process parameters, the probability of "comet tail" defects are related to density and surface quality. The main factors affecting the occurrence probability and density of "comet tail" defects are process parameters. In actual processing, it is necessary to establish a threshold of process parameters, so that the "Comet tail" defect is less within the threshold and can be quickly removed. The final threshold range is: buffing wheel speed< 220rpm, flow rate< 80L/min, depth coefficient< 0.25, magnetic field strength< 7A. By discussing the "Comet tail" defect suppression method and key technology, it provides technical support for the realization of high precision control manufacturing of single-crystal silicon. [ABSTRACT FROM AUTHOR]