1. Pt/Al 2 O 3 /TaO X /Ta Self-Rectifying Memristor With Record-Low Operation Current (<2 pA), Low Power (fJ), and High Scalability.
- Author
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Ren, Sheng-Guang, Ni, Run, Huang, Xiao-Di, Li, Yi, Xue, Kan-Hao, and Miao, Xiang-Shui
- Subjects
ALUMINUM oxide ,SCALABILITY ,STRAY currents - Abstract
Self-rectifying memristor (SRM) with high rectification ratio (RR) and nonlinearity (NL) is a superior candidate for 3-D integrated array by effectively tackling the sneak path problem. In this article, we fabricated bilayer Pt/Al2O3/TaO $_{\!{X}}$ /Ta SRMs with a 250-nm feature size, which show record-low < 2-pA operation current, >103 ON-/ OFF-ratio, >104 RR, high uniformity, and good retention. The high resistance [low resistance state (LRS): 1010โ $10^{11} \Omega $ , high resistance state (HRS): > $10^{14} \Omega $ ] yields fJ-level switching power consumption. Moreover, the SRMs exhibit superior NL (~104) and ultralow leakage current (~10 fA), leading to a calculated 538-Mbit passive array scalability with the premise of 10% read margin. Detailed mechanism analysis reveals that high RR and NL can be attributed to the high barrier in Pt/Al2O3 and Al2O3/TaO $_{\!{X}}$ interface, respectively, during the resistive switching process. Our work advances the development of SRMs for high-density passive array and even 3-D integration. [ABSTRACT FROM AUTHOR]
- Published
- 2022
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