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In this work, the stress gradient in mechanically polished tungsten sample was studied using X-ray diffraction methods. To determine in-depth stress evolution in the very shallow subsurface region (up to 10 μm), special methods based on reflection geometry were applied. The subsurface stresses (depth up to 1 μm) were measured using the multiple-reflection grazing incidence X-ray diffraction method with classical characteristic X-rays, while the deeper volumes (depth up to 10 μm) were investigated using energy-dispersive diffraction with white high energy synchrotron beam. Both complementary methods allowed for determining in-depth stress profile and the evolution of stress-free lattice parameter. It was confirmed that the crystals of tungsten are elastically isotropic, which simplifies the stress analysis and makes tungsten a suitable material for testing stress measurement methods. Furthermore, it was found that an important compressive stress of about − 1000 MPa was generated on the surface of the mechanically polished sample, and this stress decreases to zero value at the depth of about 9 μm. On the other hand, the strain-free lattice parameter does not change significantly in the examined subsurface region.

Multireflection grazing-incidence X-ray diffraction was used to investigate the structure and residual stress gradients in the near-surface region of mechanically treated titanium samples. The development of this method by using a white synchrotron beam during an energy dispersive diffraction experiment is proposed., The main focus of the presented work was the investigation of structure and residual stress gradients in the near-surface region of materials studied by X-ray diffraction. The multireflection method was used to measure depth-dependent stress variation in near-surface layers of a Ti sample (grade 2) subjected to different mechanical treatments. First, the multireflection grazing incidence diffraction method was applied on a classical diffractometer with Cu Kα radiation. The applicability of the method was then extended by using a white synchrotron beam during an energy dispersive (ED) diffraction experiment. An advantage of this method was the possibility of using not only more than one reflection but also different wavelengths of radiation. This approach was successfully applied to analysis of data obtained in the ED experiment. There was good agreement between the measurements performed using synchrotron radiation and those with Cu Kα radiation on the classical diffractometer. A great advantage of high-energy synchrotron radiation was the possibility to measure stresses as well as the a 0 parameter and c 0/a 0 ratio for much larger depths in comparison with laboratory X-rays.