1. The Manipulation of Temperature Coefficient Resistance of TaN Thin-Film Resistor by Supercritical CO2 Fluid.
- Author
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Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Tseng, Yi-Ting, Lin, Chih-Yang, and Lin, Hua-Ching
- Subjects
THIN film resistors ,TEMPERATURE coefficient of electric resistance ,SUPERCRITICAL carbon dioxide ,ELECTRIC measurements ,CRYSTAL grain boundaries - Abstract
The manipulation of temperature coefficient of resistance (TCR) in TaN thin-film resistor (TFR) was demonstrated by electrical measurement and analysis through supercritical carbon dioxide (SCCO2 fluid treatment for the first time. The negative TCR value of TaN TFR changes to positive TCR value through annealing process due to the growth and merge of TaNx grain. After SCCO2 treatment, the positive TCR value was changed back to negative TCR value in TaN TFR. The TaN grain boundary isolated by dehydroxyl effect of SCCO2 fluid treatment causes the current conduction mechanism changed to hopping conduction from ohmic conduction. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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