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The hydrogen plasma passivation of thin film polycrystalline silicon (pc-Si) was investigated in conjunction with plasma texturing process to make efficient heterojunction solar cells. The pc-Si layers were first treated using direct and remote hydrogen plasma technologies. The heterojunction solar cells were then fabricated by subsequent deposition of i/n+ a-Si:H. Hydrogenation at high temperature (610 °C) results in enhanced dissolution and diffusion of hydrogen in pc-Si by a factor of about 3 and 4, respectively, in comparison with those at low temperature (420 °C). The hydrogen atoms in the pc-Si layer mainly bond to the silicon dangling bonds and form complexes with dopant atoms. In addition, platelets defects are generated by the hydrogen plasma in the sub-surface region of pc-Si hydrogenated at 420 °C and cause higher saturation current in the space charge region whilst they form in the region deeper than 1 μm at 610 °C. Removal of the platelets using SF6/N2O plasma post-texturing after low-temperature hydrogenation not only enhances the short circuit current but also improves the open circuit voltage and the fill factor simultaneously. Combining plasma pre-texturing with high-temperature hydrogenation, the best 2 µm-thick pc-Si heterojunction solar cell reaches an efficiency of 8.54%.

Crystalline Si (c-Si) technology is dominating the photovoltaics market. These modules are nonetheless still relatively expensive, in particular because of the costly silicon wafers, which require large thickness mostly to ease handling. Thin-film technologies, on the other hand, use much less active material, exhibit a much lower production cost per unit area, but achieve an efficiency still limited on module level, which increases the total system costs. A meet-in-the-middle is possible and is the object of this paper. The development of c-Si thin-foil modules is presented: first, the fabrication of the active material on a glass module and then the processing of the Si foils into solar cells, directly on module level. The activity of IMEC in this area is put into perspective with regard to worldwide research results. It appears that great opportunities are offered to this cell concept, although some challenges still need to be tackled before cost-effective and reliable industrial production can be launched. Copyright © 2012 John Wiley & Sons, Ltd.

We investigate the effects of grain size inhomogeneity on the performance of thin film polycrystalline silicon solar cells with columnar grains. We focus on cells with an exponential distribution of the grain diameter, which approximates the grain size inhomogeneity in polycrystalline silicon films made via aluminum induced crystallization (AIC) with low temperature annealing. Through equivalent circuit simulation, we demonstrate that the size inhomogeneity will only play a role when intra grain defects, which is common in AIC cells, can be avoided. We further demonstrate that the inhomogeneity itself is not a dominant factor which limits the efficiency of these cells.

The relatively new “thin-film polycrystalline-silicon (pc-Si) (grain size of 0.1-100 µm) solar cell on foreign substrate” technology aims at low-cost devices with energy conversion efficiencies above 12 %. A very promising technique to obtain thin pc-Si layers is aluminum-induced crystallization (AIC). Solar cell absorber layers can be made by epitaxial thickening of these AIC seed layers. So far, we have reached energy conversion efficiencies of up to 8% with this approach. In contrast to what is expected a performance independent of the grain size is found which is explained by the presence of intragrain defects. In this paper the electrical activity of both the intragrain defects as well as the grain boundaries is investigated with electron beam induced current (EBIC) measurements before and after hydrogen plasma passivation. Metal-insulator-semiconductor contacts were used as collecting junction to eliminate the interference of the junction shape with the EBIC measurement as found when diffused emitters where used. It is shown that both grain boundaries and intragrain defects are electrically active before and after hydrogen plasma passivation. Finally we argue that Leff,mono, the diffusion length inside the grains, is probably much closer to 1µm in our layers than equal to 100µm as often expected in the literature.

The integration of two-dimensional (2D) periodic nanopattern defined by nanoimprint lithography and dry etching into aluminum induced crystallization (AIC) based polycrystalline silicon (Poly-Si) thin film solar cells is investigated experimentally. Compared to the unpatterned cell an increase of 6% in the light absorption has been achieved thanks to the nanopattern which, in turn, increased the short circuit current from 20.6 mA/cm2 to 23.8 mA/cm2. The efficiency, on the other hand, has limitedly increased from 6.4% to 6.7%. We show using the transfer length method (TLM) that the surface topography modification caused by the nanopattern has increased the sheet resistance of the antireflection coating (ARC) layer as well as the contact resistance between the ARC layer and the emitter front contacts. This, in turn, resulted in increased series resistance of the nanopatterned cell which has translated into a decreased fill factor, explaining the limited increase in efficiency., Authors' post-print version

Three methods for fabricating crystalline-silicon solar cells thinner than 40 µm down to 1 µm are presented, together with the integration of three nanostructuring schemes - texturing, photonic crystals, plasmons - to boost their light absorption.

The case for thin-film polycrystalline silicon (pc-Si) solar cells is strong as it combines the cost benefit of thin-films and the quality potential of crystalline Si technology. The challenge is in making high-quality pc-Si layers on non-Si substrates. By studying layers based on aluminum-induced crystallization (AIC) we previously showed that electrically active intragrain defects are a major limiting factor for thin-film polycrystalline silicon solar cells. This paper investigates the use of a recently proposed novel scanning-laser based mixed-phase solidification (MPS) process which results in large grains with a low intragrain defect density, as well as a narrow grain size distribution and strong surface crystallographic texture [6]. Through subsequent epitaxial growth, absorber layers with the desired doping and thickness can be obtained. Defect etching and TEM measurements demonstrate the drastically decreased intragrain defect density compared to the AIC-based samples. The most efficient solar cell so far has an energy conversion efficiency of 5.4% and open circuit voltage (V oc ) of around 500mV. From the preliminary results obtained, we conclude that mixed phase solidification is an attractive technique to crystallize seed layers for thin-film silicon solar cells.

A polycrystalline silicon (pc-Si) thin film with large grains on a low-cost non-Si substrate is a promising material for thin-film solar cells. One possibility to grow such a pc-Si layer is by aluminum-induced crystallization (AIC) followed by epitaxial thickening. The best cell efficiency we have achieved so far with such an AIC approach is 8%. The main factor that limits the efficiency of our pc-Si solar cells at present is the presence of many intra-grain defects. These intra-grain defects originate within the AIC seed layer. The defect density of the layers can be determined by chemical defect etching. This technique is well suited for our epitaxial layers but relatively hard to execute directly on the seed layers. This paper presents a way to reveal the defects present in thin and highly-aluminum-doped AIC seed layers by using defect etching. We used diluted Schimmel and diluted Wright etching solutions. SEM pictures show the presence of intra-grain defects and grain boundaries in seed layers after defect etching, as verified by EBSD analyses. The SEM images of diluted Wright etched pc-Si seed layer shows that grain boundaries become much better visible than with diluted Schimmel etch.

Efficient thin-film polycrystalline-silicon (pc-Si) solar cells on inexpensive substrates could lower the price of photovoltaic electricity substantially. At the MRS conference in 2006, we presented a pc-Si solar cell with an efficiency of 5.9% that had an absorber layer made by aluminum-induced crystallization (AIC) of amorphous silicon followed by high-temperature epitaxial thickening. The efficiency of this cell was mainly limited by the current density. To obtain higher efficiencies, we therefore need to implement an effective light trapping scheme in our pc-Si solar cell process. In this work, we describe how we recently enhanced the current density and efficiency of our cells. We achieved a cell efficiency of 8.0% for pc-Si cells in substrate configuration. Our cell process is based on pc-Si layers made by AIC and thermal CVD on smoothened alumina substrates. The cells are in substrate configuration with deposited a-Si heterojunction emitters and interdigitated top contacts. The front surface of the cells is plasma textured which leads to an increase in current density. The current density is further enhanced by minimizing the back surface field thickness of the cells to reduce the light loss in this layer. Our present pc-Si solar cell efficiency together with the fast progression that we have made over the last few years indicate the large potential of pc-Si solar cells based on the AIC seed layer approach.

Thin-film polysilicon solar cells are a promising low-cost alternative for bulk silicon solar cells. Due to their reduced material thickness, these solar cells are less dependent on the silicon feedstock price. Until now these devices showed a worse performance compared to bulk Si solar cells due to the small grain size and the high recombination velocity at the grain boundaries. A better understanding of hydrogen passivation is therefore of crucial importance to improve the efficiency of polysilicon solar cells. In this work we characterized fine-grained polysilicon layers with a grain size of only 0.2 μm before and after passivation. Plasma hydrogenation led to a higher hydrogen concentration in the first micron of the layer than nitride passivation. The highest efficiency of 5.0 % was reached when nitride passivation was followed by plasma passivation.

Efficient thin-film polycrystalline-silicon (pc-Si) solar cells on foreign substrates could lower the price of photovoltaic electricity. Aluminum-induced crystallization (AIC) of amorphous silicon followed by epitaxial thickening at high temperatures seems a good way to obtain efficient pc-Si solar cells. Due to its transparency and low cost, glass is well suited as substrate for pc-Si cells. However, most glass substrates do not withstand temperatures around 1000°C that are needed for high-temperature epitaxial growth. In this paper we investigate the use of experimental transparent glass-ceramics with high strain-point temperatures as substrates for pc-Si solar cells. AIC seed layers made on these substrates showed in-plane grain sizes up to 16 μm. Columnar growth was observed on these seed layers during high-temperature epitaxy. First pc-Si solar cells made on glass-ceramic substrates in substrate configuration showed efficiencies up to 4.5%, fill factors up to 75% and open-circuit voltage (Voc) values up to 536 mV. This is the highest Voc reported for pc-Si solar cells on glass and the best cell efficiency reported for cells made by AIC on glass.

A considerable cost reduction could be achieved in photovoltaics if efficient solar cells could be made from thin polycrystalline-silicon (pc-Si) layers. Aluminum-induced crystallization (AIC) of amorphous silicon followed by epitaxial thickening is an effective way to obtain large-grained pc-Si layers with excellent properties for solar cells. To obtain efficient solar cells, the electronic quality of the pc-Si material obtained by AIC has to be optimized and the cell design has to be adapted to the material. In this paper, we report on pc-Si solar cells made by AIC in combination with thermal CVD on ceramic alumina substrates. We made pc-Si solar cells on alumina substrates that showed Voc values up to 533 mV and efficiencies up to 5.9%. This is the highest efficiency ever achieved with pc-Si solar cells on ceramic substrates where no (re)melting of silicon was used. We demonstrate that the quality of the pc-Si material can be improved drastically by reducing the substrate roughness using spin-on oxides. We further show that a-Si/c-Si heterojunctions lead to much higher Voc values than diffused homojunctions. A cell concept that incorporates spin-on oxides and heterojunction emitters is therefore best suited to obtain efficient pc-Si solar cells on alumina substrates.