Author: "Yudasaka, Ichio" / Topic: thin film transistors - Searchworks@Jio Institute Digital Library Search Results

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Author: Miyasaka, Mitsutoshi, Nakazawa, Takashi, Itoh, Wataru, Yudasaka, Ichio, and Ohshima, Hiroyuki
Subjects: CHEMICAL vapor deposition, THIN film transistors, PRESSURE, TEMPERATURE
Abstract: Deals with the development of an infralow-pressure chemical vapor deposition (ILPCVD) system to improve the quality of as-deposited polysilicon. Details of the ILPCVD system; Discussion on thin-film transistor fabrication and physical analyses; Data on the pumping speed of reactor; Equality of reducing pressure and raising temperature.
Published: 1993
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Author: Kimura, Mutsumi and Yudasaka, Ichio
Subjects: *THIN film transistors, *LIQUID crystal displays, *POLYMERS
Abstract: Presents a study which developed a low-temperature polysilicon thin film transistor (LT p-Si TFT) driven light emitting polymer display with integrated drivers. Application of `LT p-Si TFT' to liquid crystal displays; Results; Conclusion.
Published: 1999
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