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Your search keyword '"Chi, Zong-Tao"' showing total 2 results
Start Over Author "Chi, Zong-Tao" Topic thin films
2 results on '"Chi, Zong-Tao"'

1. Fabrication and characteristics of VOx microbolometer integrated into gold black absorbing layer.

Author

Wang, Bin, Li, Ning, Xie, Wan-Feng, Lai, Jian-Jun, Wang, Shu-Ying, Zheng, Yu, Chi, Zong-Tao, Yu, Bing, Shen, You-Qing, and Cong, Hai-Lin

Subjects
SURFACES (Technology), VANADIUM oxide, THIN films, MICROMACHINING
Abstract

Using vanadium oxide (VOx) thin film as active layer, microbolometer with gold black absorber was fabricated due to the high mid-infrared (8-14μm) absorption property of gold black. This paper describes the design and fabrication of microbolometer with micromachining surface technology. The characteristics of the device are investigated. The detector performance exhibits maximum detectivity of 1.96 × 108cmHz1/2/W at 17 Hz with 8.8μA. [ABSTRACT FROM AUTHOR]

Published
2021
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2. Vanadium Oxide Thermal Sensitive Thin Film with TiN Absorbing Layer for Uncooled Infrared Bolometer.

Author

Wang, Bin, Li, Ning, Xie, Wan-Feng, Lai, Jian-Jun, Wang, Shu-Ying, Zheng, Yu, Chi, Zong-Tao, Yu, Bing, Shen, You-Qing, and Cong, Hai-Lin

Subjects
VANADIUM oxide, BOLOMETERS, THIN films, INFRARED detectors, INFRARED absorption, METALLIC thin films, VANADIUM
Abstract

Multilayers' absorption DMDM structure of SiO2/TiNx/SiO2/VOx structure for 8-14 infrared wavelengths is proposed and simulated. Between mid-infrared 8 μm and 14 μm wavelengths, infrared detector with this structure and thermal sensitive VOx of −7%/K TCR, which exhibits high infrared absorption about average 83%, has been fabricated and tested successfully. [ABSTRACT FROM AUTHOR]

Published
2021
Full Text
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