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Oxide-metal-oxide (OMO) multilayer film has attracted increasing interest due to its high performance, including the high optical transparency and low electric resistivity, and has been considered a promising substitute for the conventional indium tin oxide (ITO) film. In this work, we studied the role of growth parameters for the performance of sputtered ITO/Ag/ITO multilayer film. ITO/Ag/ITO film with superior properties of transmittance of 89.1% and sheet resistance of 8 Ω/□ was prepared. The effects of deviation of film thickness on the optical and properties were investigated systematically. Ultrathin ITO1−x film with thickness of less than 5 nm covers the active Ag surface to avoid Ag oxidation effectively, resulting in both high transmittance and conductivity. The X-ray photoelectron spectroscopy depth profile analysis indicates the role of ultrathin ITO1−x film on Ag surface oxidation. This work provides a guideline to fabricate high-quality OMO-based films and devices. [ABSTRACT FROM AUTHOR]

Sputtered amorphous carbon thin films were explored as corrosion resistant coatings on aluminum thin films to be incorporated into x-ray detector windows. The requirements for this application include high corrosion resistance, low intrinsic stress, high strains at failure, and high x-ray transmission. Low temperature sputtering was used because of its compatibility with the rest of the window fabrication process. Corrosion resistance was tested by exposure of carbon coated and uncoated Al thin films to humidity. Substrate curvature and bulge testing measurements were used to determine intrinsic stress and ultimate strain at failure. The composition and bonding of the carbon films were further characterized by electron energy loss spectroscopy, Raman spectroscopy, and carbon, hydrogen, and nitrogen elemental analyses. Samples had low compressive stress (down to.08GPa), a high strain at failure (3%), and a low fraction of sp³ carbon-carbon bonds (less than 5%). The high breaking strain and excellent x-ray transmission of these sputtered carbon films indicate that they will work well as corrosion barriers in this application. [ABSTRACT FROM AUTHOR]

Interface engineering has emerged as a fertile and efficacious approach to turn functional properties in the field of film systems. In this work, the interfacial properties of sputtered yttrium oxide films on zinc sulfide substrate (Y 2 O 3 /ZnS) were analyzed by transmission electron microscopy (TEM), X-ray photoelectron spectrum (XPS) depth profile and nano-scratch measurement. An interface layer with the depth of 20 nm between Y 2 O 3 film and ZnS substrate was directly observed by TEM. Under different film growth conditions, although the interfacial features including interfacial width and composition distribution exhibit similar behavior, it is found that higher cohesive strength is obtained under a special substrate bias voltage of −160 V at low substrate temperature. Such an enhanced mechanical property can be understood by the role of physisorbed oxygen in the interfacial region, in which less physisorbed oxygen with van der Waals bonds leads to a strong adhesion. Our results provide a favorable strategy to achieve strong adhesion between oxide and sulfide at low temperature, which are urgent in future micro-electric applications. [ABSTRACT FROM AUTHOR]

This paper investigates the influence of deposition conditions on the properties of yttrium oxide thin films. The paper focuses on the texture, optical and mechanical properties. With this objective, a series of yttrium oxide thin films with different thicknesses were deposited by direct current (DC) unbalanced reactive magnetron sputtering at high and low pumping speed. By changing the oxygen flow, depositions were performed in the three characteristic deposition modes for reactive magnetron sputtering, i.e., metallic, transition and poisoned mode. By using an oxygen flow directed to the substrate, full oxidation of the samples, as shown by X-ray photoelectron spectroscopy (XPS), in the three modes is obtained. Crystallographic characterization by X-ray diffraction (XRD) shows that films crystallize in the cubic phase with a strong (222) out-of-plane orientation at low oxygen flow. As the oxygen flow increases a mixture of cubic and monoclinic phase is obtained. In poisoned mode, the films consist of the cubic phase with preferred (420) orientation. Scanning electron microscopy (SEM) cross sections show, with increasing oxygen flow, a loss of the columnar structure. As the oxygen flow rates increase through the metallic, transition, and the poisoned mode, the grain size becomes gradually smaller. An overview diagram of all experimental results uncovers that the textural changes are closely linked to the oxygen partial pressure rather than the oxygen flow. The optical properties of films were investigated by spectroscopic ellipsometry (SE). The films with a columnar structure demonstrate superior hardness and modulus as well as the high plasticity. [ABSTRACT FROM AUTHOR]

Abstract: A series of yttrium oxide films has been fabricated on Si (100) wafers by different substrate temperatures based on reactive magnetron sputtering technology. And the evolution of composition, microstructure and optical properties of Y2O3 films has been investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and spectroscopic ellipsometry (SE). It is shown that stoichiometric Y2O3 with much strong Y O bond and cubic nanophase with larger size notably enhance the optical properties, especially refractive index. At low substrate temperature, the composition of Y2O3 films has nonstoichiometry feature accompanying with much physisorbed oxygen (Oδ) compared with these at high temperature. Increasing substrate temperature promotes the formation of Y O bonds, approaching the stoichiometry with lower Oδ content. The film commences crystallizing at room temperature, and transformation of crystalline phase from monoclinic to cubic occurs, along with preferred (111) orientation and large grain as temperature increases. The results facilitate clear relationship between the characterizations of Y2O3 film and growth parameters, also, it can be realized that adjustment of optical constants of Y2O3 films in a large range having the aid of substrate temperature to obtain desirable composition and structure for optical applications. [Copyright &y& Elsevier]

Abstract Transparent electronic technology has many urgent optoelectronic device applications. A key component of plasmonic materials in conventional semiconductors is the wide band gap of oxide thin films. Although transparent electronic materials have been developed for visible and near-infrared wavelengths, systems incorporating mid-infrared and far-infrared spectra are difficult to achieve. In this study, hydrated magnesium-carbon films, a new type of non-oxide transparent conductive thin films with a magnesium hydroxide structure, were generated using the three-step method. After annealing treatment, larger crystals in the thin films typically exhibited superior film resistivity, with conductivity values of approximately 8.63 × 10−3 Ω m. Due to the free electron concentration was not more than 1020 cm−3, the films demonstrated excellent optical properties, with plasma wavelength values of approximately 8 μm for infrared transmittance above 70%. After annealing, due to the Moss-Burstein (M-B) effect, the visible light transmittance was greater than 85% and the optical bandgap shifted towards the blue region. In addition, the influences of the sputtering power of the carbon target on the properties of hydrated magnesium-carbon film were also discussed in this paper. Graphical abstract Image 1 Highlights • We prepare hydrated magnesium-carbon films using the three-step method. • We analyze the effect of annealing on structural, electrical, and optical features. • Annealing leads to crystal growth, superior film resistivity, and good conductivity. • Films exhibit excellent optical properties, particularly for far-infrared ranges. • The films can replace TCO in the application of optical-electronic devices. [ABSTRACT FROM AUTHOR]

The hydrated magnesium-carbon films fabricated in this study are the novel-innovative non-oxide-type transparent electronic material. The films, which have a structure similar to that of magnesium hydroxide, were produced by making Mg x -C y films deposited by magnetron co-sputtering react with water vapor. As the extrinsic defect of hydration magnesium-carbon films, C atoms provided redundant electrons, resulting in a conductivity of approximately 3.31 × 10 −2  Ω·cm. Although the conductivity of hydrated magnesium-carbon films is not prominent comparing to the conventional and widely-used n-type TCO materials, e.g. ITO, the films also showed excellent optical properties, which can be attributed to their low bond energy, with the infrared transmittance of the films being greater than 72% for a plasma wavelength of approximately 10 μm. By varying the atomic C content of the films, a visible-region transmittance greater than 80% could be realized. The optical bandgap of the films was approximately 4.04–6.87 eV and was blue-shifted because of the Moss-Burstein effect. [ABSTRACT FROM AUTHOR]

The cycling of phosphorus (P), iron (Fe) and sulfur (S) in sediments has been previously investigated, but its impacts on the formation of black-odorous waterbodies remains unclear. Here, high-resolution (i.e., 2 mm for P and Fe, and 0.042 mm for S of 2D presentation) simultaneous measurements of P, Fe, and S profiles in river sediments based on the diffusive gradients in thin-films (DGT) technique were conducted in the Pearl River Delta region, South China. Similar distribution trends and significant positive correlations (R = 0.67–0.93, p < 0.01) were observed between Fe and P. Considering the high diffusion fluxes of Fe and P together, it revealed that P release was promoted by the Fe reduction. The two-dimensional labile S profiles showed that their concentrations in sediments were higher by factors of 1.6–20 than those in overlying water. The minor diffusion fluxes of S and the accumulation of acid volatile sulfide indicated that S2− combining with Fe2+ occurred prior to diffusion. Furthermore, the formation mechanisms of black-odorous waterbodies were explored: (i) oxygen depletion by COD and NH 4 +‒N and large amounts of sulfate input were the main exogenous driving factors. (ii) Reduction of Fe and S to form ferrous sulfide accompanied with P release in sediments were the dominant endogenous causes. These observations together with mechanism analysis can provide a basis for the governance of black-odorous rivers. Image 1 • P release in black-odorous sediments was largely controlled by iron reduction. • The distribution of labile S in sediments presented large degrees of heterogeneity. • Fe(III) & SO 4 2− reduction coupled with P release leads to black-odor. [ABSTRACT FROM AUTHOR]