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In order to provide a contactless measurement technique to examine products during the fabrication process, a modular design of an eddy current micro sensor was developed and fabricated in thin-film technology. The sensor consists of two parts, a single-turn excitation coil and an anisotropic magneto-resistance (AMR) sensor. The AMR sensor detects the change of the magnetic field induced in a sample by the excitation coil. Initial investigations were conducted to prove the capability of the completed eddy current micro sensor. A defect was created on the surface of a Cu probe. The electrical output signal of the AMR sensor was subsequently compared to optical measurements of the surface profile of the crack. There is a high correlation between the optical measurements and to those of the eddy current micro sensor. [ABSTRACT FROM AUTHOR]

New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Production Technology. It enables the deposition of sensor systems directly onto technical surfaces. Compared to commercially available systems, it has no spatial limitations concerning the maximum coatable component size. Moreover, it enables a simultaneous structuring of deposited layers. Within this paper, characterisation techniques, results and challenges concerning directly deposited thin film strain gauges with the new sputter coating system are presented. Constantan (CuNiMn 54/45/1) and NiCr 80/20 are used as sensor materials. The initial resistance, temperature coefficient of resistance and gauge factor/k-factor of quarter-bridge strain gauges are characterised. The influence of a protective layer on sensor behaviour and layer adhesion is investigated as well. Moreover, the temperature compensation quality of directly deposited half-bridge strain gauges is evaluated, optimised with an external trimming technology and benchmarked against commercial strain gauges. Finally, the suitability for high-temperature strain measurement is investigated. Results show a maximum operation temperature of at least 400 °C, which is above the current state-of-the-art of commercial foil-based metal strain gauges. [ABSTRACT FROM AUTHOR]