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Worldwide, silicified woods are found in many geological formations. Significantly, the organic materials of wood are no longer dominant; almost all wood fossils have been mineralized into inorganic silica materials. These unique geological processes must be understood to develop better understanding on organic material fossilization, particularly in the micron scale. Therefore, our aim was to characterize the composition of silicified wood using comprehensive microanalysis. The methods utilized were XRF, ICP-MS, XRD, FTIR, and FE-EPMA. Specimens are from Jasinga, West Java, Indonesia. The results showed that wood silicification was controlled by the infiltration of silica from the host rock into the spaces of the wood structure. In Jasinga, they are controlled by Pliocene tuffaceous sedimentary rocks. The ratio of silica phases revealed a trend in the degree of silicification. Besides silica, the distribution of trace elements also demonstrates the geochemical interaction between the wood fossil and host rock. Wood fossils are affected by the gradual replacement of organic carbon-based materials with silica through silicification. Silica enrichment occurs in the internal of wood, facilitates permineralization and recrystallization. Silica replaces organic material and preserves the wood structures. The microanalytical approach provides comprehensive perspectives on wood petrification, leads to better insights for paleontological studies. [ABSTRACT FROM AUTHOR]