1. Characterization of optical materials for EUV spectral region: methods and analysis.
- Author
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Zuppella, Paola, Gaballah, Ahmed E., Ahmed, Nadeem, Jimenez, Kety, and Nicolosi, Piergiorgio
- Subjects
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OPTICAL materials , *LIGHT sources , *LABORATORY techniques , *SYSTEMS development , *EXTREME ultraviolet lithography - Abstract
The CNR–IFN laboratories in Padova are traditionally involved in the development and characterization of materials and optical components for applications in the extreme ultraviolet spectral region. The interest ranges from assembling, calibration and testing of instrumentation for ESA space missions, to the development of optical systems for third/fourth generation sources and lithography tools. The involvement in these activities has allowed the development and the tuning of several laboratory techniques, powerful and complementary to the use of large–scale facility like synchrotron light sources. We will give an overview of the expertise and potentialities currently available in the CNR–IFN laboratories in Padova. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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