601. Implantation-enhanced oxidation of tantalum for capacitor structures
- Author
-
M. Nobes, M.A. Mohammed, and D.V. Morgan
- Subjects
Tantalum capacitor ,Thermal oxidation ,Fabrication ,Materials science ,business.industry ,technology, industry, and agriculture ,Tantalum ,Oxide ,chemistry.chemical_element ,Dielectric ,law.invention ,chemistry.chemical_compound ,Capacitor ,Ion implantation ,chemistry ,law ,parasitic diseases ,Electronic engineering ,Optoelectronics ,Electrical and Electronic Engineering ,business - Abstract
The letter investigates the enhanced thermal oxidation of tantalum using oxygen-ion implantation. A comparison of the electrical and dielectric properties is made between the oxygen-implanted thermal oxides and of those fabricated without implantation. The ion-implanted tantalum-oxide films are shown to be superior to the unimplanted layers for the fabrication of oxide capacitors.
- Published
- 1989
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