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This study investigates complex acoustical intensity using a polyvinylidene fluoride (PVDF) bimorph. Analytical models of the open-circuit voltage outputs of an infinite-strip-shaped PVDF bimorph cantilever in an underwater sound field are developed. Results show that the sound pressure generates the sum of the outputs, while the particle velocity normal to the PVDF surface generates the difference. The sensitivities of the pressure- and velocity-generated voltage responses with respect to an incident plane sound field demonstrate uniform directivity in a low-frequency range, which is suitable for acoustical intensity determination. The higher velocity sensitivity confirms the advantage of using a PVDF bimorph as a velocity sensor, owing to its light weight and flexibility. An algorithm for determining the complex acoustical intensity normal to the surface is proposed by utilizing those voltage responses and the probe gain calibrated with a given angle of incident sound. This algorithm allows accurate determination of sound intensity of a plane wave field, where the reactive part of intensity is absent. However, a small error may exist when the reactive intensity is large and active intensity is small. This small discrepancy arises from the inherent variation in the phase directivity of the gains, which decrease with frequency.

Piezoelectric energy harvesting (PEH) remains a key area of interest for academic research due to its fast advancement and growing demand for low-powered electronics. In this study we have investigated various energy harvesting scenarios including PZT bimorph cantilever, circular bimorph with a fixed constraint at the center and at the perimeter, roller constraint at the center and at the perimeter, and circular unimorph disc with a fixed constraint at the center and at the perimeter, as well as a unimorph with two different dimensions. Modeling and simulation are performed in COMSOL for all scenarios starting from an aluminum shim (for stress/strain analysis) then bimorph/unimorph (for analysis of voltage/power). Samples are prepared in accordance with model analysis and tested on a custom-made experimental setup. Simulated and experimental results are compared and found to be in agreement. Surprisingly, a circular unimorph disc with a fixed constraint at the center shows the best result producing 7.1 V at 500 Hz with a broadband curve (450 Hz to 650 Hz). The PZT circular unimorph disc with the highest power density of 1.6234 mW/cm2 is found to be the most efficient variant.

In this work, Shape-memory alloy (SMA)-based micromirrors were fabricated and the actuation was controlled through thermal stimulus. The micromirrors play a significant role in scanning and light deflection in the MEMS field. The SMA micromirrors were developed by coating CuAlNi thin film on strained kapton polyimide substrate using thermal evaporation. Later patterns were made on micromirrors for transmission and reflection of the light beam during actuation. The displacement of each distinct pattern was explored at different voltages ranging from 1 to 3 V through Joule heating technique. The maximum displacement observed was 1.9 mm for deltoid-patterned micromirror at 3 V. The ladder pattern recorded the minimum deflection of 1.1 mm at 3 V. The shape recovery ratio analysis showed that deltoid pattern bimorph had the highest recovery of 1.656. Energy-Dispersive X-ray Spectroscopy (EDS) analysis showed that the composition was maintained after the deposition.

The abundant waste thermal energy from various sources can be efficiently harvested using material-based technology. Shape memory alloy (SMA) is an efficacious material-based technology for recovering waste heat. In this work, the NiTi SMA bimorph belt has been fabricated in flash evaporation equipment using a customized substrate holder setup. The SMA bimorph belt has been developed with three different prestrain percentage of 1, 3, and 5%. The kapton polyimide substrate is prestrained using a tensile testing setup before the deposition. The actuation characteristics and material characterization of this bimorph belt with varying prestrain percentages have been analyzed. The prestrained bimorph belt with superior material properties and actuation characteristics is used for harnessing the waste heat energy. The actuation performance explored through plate heating reveals 5% prestrain in the bimorph has the maximum shape recovery ratio in both butterfly and cantilever configuration. The contact-based electrical actuation (Joule heating) showed a maximum deflection of 1 mm at 5% prestrain. The adhesion and composition of the bimorph are unaltered with varying prestrain percentage. The morphology shows smooth deposition without any pores and the mechanical strength reduces with an increase in prestrain percentage. The SMA bimorph belt with 5% prestrain generated 60 rpm with aluminum hub and 45 rpm with the polylactic acid hub in the developed prototype using simulated exhaust heat condition.

In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves in a bimorph composed of lithium niobate on silicon dioxide. Our approach breaks through a performance boundary in conventional Lamb-wave resonators by introducing the bimorph while operating at higher order resonant modes. This enables the resonator to achieve frequency scalability, a low-temperature coefficient of frequency, and high electromechanical coupling altogether. The electromechanical coupling and temperature coefficient of the resonator were analytically optimized for the A3 mode through adjusting the thicknesses of different materials in the bimorph. Resonators with different dimensions and stack thickness were fabricated and measured, resulting in a temperature coefficient of frequency ranging from −17.6 to −1.1 ppm/°C, high electromechanical coupling ranging from 13.4% to 18%, and quality factors up to 800 at 3.5 GHz. The achieved specifications are adequate for fifth-generation (5G) sub-6-GHz frequency bands n77 and n78.

This paper reports a bimorph pinned piezoelectric micromachined ultrasonic transducer (PMUT) for enhanced sound pressure output and electromechanical coupling factor for space imaging applications. An equivalent circuit model has been built to analyze the dynamic behavior of PMUTs and prototype devices have been designed, fabricated. Experimental results show a 58% measured increase in the electromechanical coupling factor and pulse-echo measurements show a 4-meter traveling distance in air under a 133 kHz driving frequency. As a demonstration example, a relatively long-distance (>1.5 meters) ultrasound imaging test in air is conducted using a $4\times 4$ bimorph, pinned dual-electrode PMUTs array based on the transmission beamforming scheme. As such, this work enhances and extends the PMUT performances and capabilities for potential broad applications. [2021-0102]

Amorphous ribbons from a rapidly quenched alloy of the TiNi–TiCu quasi-binary system with copper content of 30 at % are crystallized via electric pulse treatment with variable durations of impact in the range of 1 to 100 ms at external tensile stress of up to 250 MPa. It is shown that the formed bimorph structure of columnar and coarse crystals is characterized by considerable differences when compared to a rapidly quenched alloy with 25 at % copper. An increase in tensile stress does not affect the phase composition or microstructure of the alloy, but it does lower the critical temperatures of martensitic transformation.

The actuators for precise positioning based on bimorph structures of piezoelectric LiNbO3 and LiTaO3 crystals are considered. The optimal orientations of the actuator plates ensuring the highest possible displacements are determined by the extreme surfaces technique and the finite-element method. The simulated displacements for optimal orientations of LiNbO3 and LiTaO3 plates are compared with those obtained experimentally for manufactured LiNbO3 and LiTaO3 actuators, whose orientations are not optimal. As is shown, the optimal configuration of the actuator allows us to significantly increase its displacement for both LiNbO3 and LiTaO3 specimens.

Soft electrothermal actuators have been of particular interest to researchers in soft mechatronic/robotic systems due to their large deformation, lightweight, and low power actuation. Closed-loop control of soft actuators is critical for high-precision applications, due to the nonlinear relationship between actuation voltage and output bending motion. In this article, a resistive self-sensing approach was developed for the soft electrothermal actuator, which enables the closed-loop control of the actuator without external sensors. The self-sensing of the actuator's deformation is achieved by measuring the resistance change of the embedded microfilament heater of the soft electrothermal actuator. When the bimorph electrothermal actuator deflects under the temperature change, its deflection can be detected by the temperature-incurred resistance change of the embedded heater. A closed-loop controller was designed using the self-sensed deflection signal. To handle the different responses of the actuator in the heating and cooling stages, a switching proportional-integral-derivative control algorithm was designed. Specifically, two sets of control parameters were tuned and used for the heating and cooling stages, respectively. The performance of the designed control algorithm was evaluated for step response, tracking of complex wave signals, and disturbance rejection. Compared with the open-loop operation, the closed-loop controlled actuator demonstrated a much more rapid and accurate response (the rising time and settling time were reduced over 80%) and excellent tracking and disturbance rejection capabilities.

3-D-printed structures integrated with laser-cut spiral PZT bimorphs are used to obtain low mechanical resonance frequencies for energy harvesting and a vibration-activated mechanical switch. This structure is used to realize a batteryless vibration event detector and RF transmitter, using the energy in the vibration and a mechanical switch as a comparator. The low-resonance frequency of the 3-D-printed mechanical resonators is used to supply significant mechanical resonance gain and trigger the impulse response of the PZT bimorphs, resulting in an upconversion of resonance frequencies. RF pulses are generated by an LC resonator and transmitted by a loop antenna for reporting event detection. The 3-D-printed structure has resonances as low as 17.5 to 40 Hz corresponding to the vibration energy spectrum readily available in the environment. Theory and experiments to verify RF output are presented. At 40 Hz and 0.75 g excitation, the resulting RF pulse is at a carrier frequency of 10.9 MHz with energy extracted from the bimorph of 0.95 nJ per pulse. As a demonstration of the device, the wireless sensor node is used to identify operational modes of a portable gasoline electric generator.

Soft actuators and microrobots that can move spontaneously and continuously without artificial energy supply and intervention have great potential in industrial, environmental, and military applications, but still remain a challenge. Here, a bioinspired MXene-based bimorph actuator with an asymmetric layered microstructure is reported, which can harness natural sunlight to achieve directional self-locomotion. We fabricate a freestanding MXene film with an increased and asymmetric layered microstructure through the graft of coupling agents into the MXene nanosheets. Owing to the excellent photothermal effect of MXene nanosheets, increased interlayer spacing favoring intercalation/deintercalation of water molecules and its caused reversible volume change, and the asymmetric microstructure, this film exhibits light-driven deformation with a macroscopic and fast response. Based on it, a soft bimorph actuator with ultrahigh response to solar energy is fabricated, showing natural sunlight-driven actuation with ultralarge amplitude and fast response (346° in 1 s). By utilizing continuous bending deformation of the bimorph actuator in response to the change of natural sunlight intensity and biomimetic design of an inchworm to rectify the repeated bending deformation, an inchwormlike soft robot is constructed, achieving directional self-locomotion without any artificial energy and control. Moreover, soft arms for lifting objects driven by natural sunlight and wearable smart ornaments that are combined with clothing and produce three-dimensional deformation under natural sunlight are also developed. These results provide a strategy for developing natural sunlight-driven soft actuators and reveal great application prospects of this photoactuator in sunlight-driven soft biomimetic robots, intelligent solar-energy-driven devices in space, and wearable clothing.

This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during the fabrication processes. The main issue is the vibrated deflection from the diaphragm that influences the sound pressure level (SPL) of MEMS speakers. To comprehend the correlation between the geometry of the diaphragm and vibration deflection in cantilevers with the same condition of activated voltage and frequency, we compared four types of geometries of cantilevers including square, hexagon, octagon, and decagon in triangular membranes with unimorphic and bimorphic composition by utilizing finite element method (FEM) for physical and structural analyses. The size of different geometric speakers did not exceed 10.39 mm2; the simulation results reveal that under the same condition of activated voltage, the associated acoustic performance, such as SPL for AlN, is in good comparison with the simulation results of the published literature. These FEM simulation results of different types of cantilever geometries provide a methodology design toward practical applications of piezoelectric MEMS speakers in the acoustic performance of stress gradient-induced deflection in triangular bimorphic membranes.

A nonlinear developed model for various PZT wind energy harvesters with arbitrary dimensions and location of electroceramics has been prepared. This model can describe unimorph and bimorph harvesters with different cantilever cross-sections attached to a tip body with different shapes. The system model has been validated with results reported in the literature. A set of parametric studies has been conducted to examine the influences of the cantilever shape in addition to the shape of the tip body. Furthermore, the impacts of load resistance and wind speed on the output power have been analyzed. The effects of number, position, and dimensions of piezoceramics on the harvester performance have also been investigated. It is found that by increasing the total area of electroceramics (including the length, width, or the number of PZT patches), the peak of the wind critical speed and the middle resistance range where the instability speed is very sensitive to the electrical load shifts toward the lower resistances. Moreover, several instrumental points to design efficient and affordable vibrating wind harvesters at low and high flows have been obtained.

The steady-state parametric analysis of a piezoelectric-coupled rotating tapered-bimorph system consists of a central host beam and two piezoelectric ceramic patches above and below it, tapering along positive X-direction and rotating in the X–Y plane, subjected to axial dynamic as well as static loading at its one end is done. The influence of three boundary conditions and various system parameters are also studied. The mathematical modeling of the rotating tapered-bimorph system is formulated with the help of Hamilton's equation. The parametric analysis of the axially loaded system is done for clamped-free (C-F), pinned-pinned (P-P), and clamped-pinned (C-P) boundary conditions. A number of parametric instability regions along with static buckling load plots are obtained and analyzed for various values of the piezoelectric patches to the host beam thickness ratio, taper parameter, and rotational frequency using MATLAB software and depicted through a series of diagrams. The results illustrate that the principal modal frequencies of the tapered-bimorph rotating system are increased rapidly with an increase in the thickness ratio, whereas increase less significantly with a rise in taper parameter and spinning speed for both the static and dynamic loading conditions. The lowest first modal frequency is observed for the P-P system under any given system configurations and operating conditions, which can be used for low-frequency rotational vibration energy harvester over the orthodoxly used C-F system. Designing low-frequency rotational vibration energy harvester and rotor blades can be done by selecting appropriate dimensions and parameters presented in this article.

A vibrotactile actuator driven by light energy is developed to produce dynamic stimulations for haptic rendering on a thin-film structure. The actuator is constructed by adopting a thermal bimorph membrane structure of poly(3,4-ethylenedioxythiophene) doped with p-toluenesulfonate (PEDOT-Tos) coated onto a polyethylene terephthalate (PET) film. Upon irradiation of near-infrared (NIR) light, the light energy absorbed at the PEDOT-Tos layer is converted into thermoelastic bending deformation due to the mismatch in coefficient of thermal expansion between PEDOT-Tos and PET. Since the light-induced deformation is reversible, spatially localized, and rapidly controllable with designed light signals, the proposed actuator can produce vibrotactile stimulation over 10 dB at arbitrary areas in the human-sensitive frequency range from 125 to 300 Hz using a low input power of ∼2.6 mW mm-2, as compared with a complex electrical circuit and high input power needed to achieve such actuation performance. Together with its simple structure based on light-driven actuation, the advent of this actuator could open up new ways to achieve substantial advances in rendering textures at a flexible touch interface.

This study presents the Internet-of-things (IoT) based Foot-step equipped piezoelectric sensors (F-SEPS) application, which are used for charging the mobile phone devices respectively. Genetic Algorithm, Big Bang–Big Crunch Algorithm (BB–BC) and Hybrid Big Bang Big Crunch tuned Genetic Algorithm (HBBBCGA) are the optimization techniques used for optimizing eight types of unimorph and bimorph structures (Type A-unimorph structure without proof mass, Type B-unimorph structure with proof mass at left location, Type C-unimorph structure with two proof mass and Type D-unimorph structure with three proof mass, Type E-bimorph structure without proof mass, Type F-bimorph structure with proof mass at left location, Type G-bimorph structure with two proof mass and Type H-bimorph structure with three proof mass). The piezoelectric, substrate and the proof mass materials are chosen to be PZT-5H, Structural steel and Aluminium. The simulation analysis for the eight types of structures are evaluated using COMSOL Multiphysics 5.3a and MATLAB software, in which the HBBBCGA optimized Type H structure generates maximum power respectively. An experimental study is conducted between the un-optimized and HBBBCGA optimized unimorph and bimorph structures (Type A, D, E and H) which are implemented using two case studies [(case study 1–25 years and 38 kgs) and (case study 2–40 years and 64 kgs)] in IoT based F-SEPS application. In the analysis, the case study 2 using HBBBCGA optimized Type H structure generates maximum amount of power and proved to be more effective for charging mobile devices.

In the microelectromechanical system, micropump is a very valuable device in various applications like drug delivery, electronics cooling system, etc. Control flow enhancement is the prime motive in the micropump application. In the case of diaphragm based micropump, fluid flow is based on the diaphragm actuation. The piezoelectric diaphragm is used for the control of fluid flow. In this paper new design of the piezoelectric actuator is proposed and compare with the regular circular actuator design and fluid flow analysis. Finite element analysis is carried out using ANSYS 12.1 software for the purpose. Simulation results show that the deflection of the new Strip Piezo Bimorph Disc (SPBD) actuator improves, thus improves the performance of the micropump.

Oscillation, widely existing in nature, is of vital importance for human society (e.g., energy utilization, signal transmission and communication), but preparing soft self-oscillators with facile accessibility, fatigue resistance, precise and noncontact control in multi-way tunable approaches is still desirable and challenging. Here, we report the fabrication of a light-driven tunable self-oscillator based on bimorph films of commercial Kapton and photoactive liquid-crystalline polymers with physical crosslinking sites, which can be remotely powered under constant irradiation of UV/visible light. The photomechanical behaviors of the bimorph actuators are acquired from the photoinduced changes in the volume of the photoactive polymer, and both the cis-azobenzene content and the trans–cis dynamic isomerization process are determinant factors. By combining the self-shadowing effect and inertia effect of the actuator, self-sustained oscillation is obtained. In nature, only leaves with particular size and weight could sway as appropriate strong wind blows from a specific direction, which inspires us to tune the oscillating frequency and amplitude with multiple approaches, like light intensity/wavelength (from UV to visible light), irradiated position, and size/weight of the oscillator for regulating the inertia effect. Such autonomously light-fueled self-oscillators are found to have potential applications in detecting charges and signal transmission.

This research paper is an attempt to present an insight into the use of micro electromechanical systems (MEMS) technology harvesting of green energy. One of the common examples of MEMS technology is by utilizing bimorph cantilever beams. Subsequently, it has also been discussed that Bimorph cantilever beam based sensors with high sensing ability could be used for harvesting energy from the physical environment. In this paper, we concentrate on the comparative analysis of the MEMS and piezoelectric materials which are used to design bimorph cantilever beams and convert mechanical energy into electrical energy. Detailed performance analysis of bimorph cantilever beams made of different materials has been carried out through various simulation models. Design and the simulation of bimorph cantilever beam is performed using Comsol multiphysics 5.2. state of art software. Comparative analysis of Lead zirconate (PZT-4D) and Lead zirconate (PZT-7A) has been done in this research to find more suitable material for fabrication of bimorph cantilever beams. PZT-7A is found to provide better electrical output for various analysis performed.

The optimization of the microactuation of shape memory alloy films in bimorph architectures was analysed for various film thickness and substrates material architectures, based on a known model that uses the fraction of phases during the martensitic transformation to evaluate the properties of the shape memory alloy film. It was shown by appropriately selecting the substrate material it is possible to maximize the deflection of the tip of a cantilever-type microactuator. For NiTi films, the increase of the active material thickness, as expected, leads to increased actuation, however the thermoeleastic properties of the substrate contribute to the stress achieved at the onset of the martensitic phase transformation, with higher values corresponding to larger actuation. Also depending on the thermoelastic constants of the substrate, the curvature of the cantilever-type microactuator can be toward the deposited film or toward the substrate. Si, Mo and Ti generated bending toward the shape memory alloy film, while Ni, stainless steel and Upilex S ended up bending toward the substrate. The result are important for the prediction of complex actuation complex architectures with potential to be used in micro-electromechanical systems.

Soft robots that can move like living organisms and adapt to their surroundings are currently in the limelight from fundamental studies to technological applications, due to their advances in material flexibility, human-friendly interaction, and biological adaptation that surpass conventional rigid machines. Light-fueled smart actuators based on responsive soft materials are considered to be one of the most promising candidates to promote the field of untethered soft robotics, thereby attracting considerable attention amongst materials scientists and microroboticists to investigate photomechanics, photoswitch, bioinspired design, and actuation realization. In this review, we discuss the recent state-of-the-art advances in light-driven bimorph soft actuators, with the focus on bilayer strategy, i.e., integration between photoactive and passive layers within a single material system. Bilayer structures can endow soft actuators with unprecedented features such as ultrasensitivity, programmability, superior compatibility, robustness, and sophistication in controllability. We begin with an explanation about the working principle of bimorph soft actuators and introduction of a synthesis pathway toward light-responsive materials for soft robotics. Then, photothermal and photochemical bimorph soft actuators are sequentially introduced, with an emphasis on the design strategy, actuation performance, underlying mechanism, and emerging applications. Finally, this review is concluded with a perspective on the existing challenges and future opportunities in this nascent research Frontier.

The article presents the study of the deformation of an SMA bimorph actuator during static heating. The thermomechanical behavior of thin film CuAlNiMn shape memory alloy (SMA) on polyimide substrate is analyzed using finite element method. The analysis is carried out for three different geometries to obtain the displacement when temperature is varied. The actuation characteristics of the SMA bimorph are studied through direct heating and joule heating techniques. The surface morphology and composition of the bimorph sample are obtained using the Scanning Electron Microscope (SEM). The numerical analysis of the thermomechanical behavior of a thin film CuAlNiMn SMA bimorph is carried out using the finite element method. The procedure is applied for a double-legged cantilever configuration of the bimorph to obtain the actuation in terms of displacement; by varying the temperature. The same is repeated for semi-circular and pentagon shapes of the bimorph to obtain the influence of area on the displacement. It is observed that SMA bimorph displaces with the rise in temperature and the magnitude of displacement increases with the increase in surface area of different geometries. The physical actuation characteristic of CuAlNiMn-polyamide bimorph is studied by thermal heating and electrical heating of the sample, which confirm the shape memory effect of the SMA and provide the displacement characteristics of the bimorph when applying an electrical current.

The article reviews the methods and instrumentation for the study of tribological and mechanical properties of the surface. It is established that the most common methods for studying these properties in the micro and nanodranges are contact methods based on the interaction of the hard tip with the material under study. In scanning probe microscopy for the complex study of tribological and mechanical properties of the surface, the main element of the measuring modules used for nanoindentation and sclerometry is a bimorph piezoceramic probe sensor with a diamond tip. The original design of the sensor allows to implement more than ten measuring techniques on one device. The operation of these devices in the semi-contact scanning probe-microscopic mode allows to obtain images of the surface relief and a map of the distribution of elastic properties. The indentation mode allows to measure hardness and modulus of elasticity, to estimate elastic recovery of material after indentation. The method of measuring hardness according to the image of the restored imprint (a method similar to classical microindentation) is implemented. The method of scratching is implemented, followed by obtaining image of the relief of the surface on the restored imprint. The method allows to determine the abrasion resistance and hardness of the material, adhesion and thickness of thin coatings.

In this paper, an active tactile sensor system for measurement of Young’s modulus and viscosity is developed. For the active sensing, the sensor unit with the 8 bimorph piezoelectric array is bonded to the speaker that is driven by a square wave. The transient response from the sensor signal of each bimorph piezo cell is processed to reduce the noise. From the output, the first peak and the ratio of first peak to time of first peak are extracted as the indexes for the measurement of Young’s modulus and viscosity, respectively. It is confirmed that the first peak has a clear correlation with the Young’s modulus, and that the ratio of first peak to time of first peak has a definite correlation with the viscosity. Further, the initial contact force affects the sensitivities of Young’s modulus and viscosity.

Piezoelectric harvesters use the actuation potential of the piezoelectric material to transform mechanical and vibrational energies into electrical power, scavenging energy from their environment. Few research has been focused on the development and understanding of the piezoelectric harvesters from the material themselves and the real piezoelectric and mechanical properties of the harvester. In the present work, the authors propose a behavior real model based on the experimentally measured electromechanical parameters of a homemade PZT bimorph harvester with the aim to predict its Vrms output. To adjust the harvester behavior, an iterative customized algorithm has been developed in order to adapt the electromechanical coupling coefficient, finding the relationship between the harvester actuator and generator behavior. It has been demonstrated that the harvester adapts its elongation and its piezoelectric coefficients combining the effect of the applied mechanical strain and the electrical behavior as a more realistic behavior due to the electromechanical nature of the material. The complex rms voltage output of the homemade bimorph harvester in the frequency domain has been successfully reproduced by the proposed model. The Behavior Real Model, BRM, developed could become a powerful tool for the design and manufacturing of a piezoelectric harvester based on its customized dimensions, configuration, and the piezoelectric properties of the smart materials. This research was funded by the Basque Government, grant number KK-2021/00082-µ4IIoT, and by the European Commission, grant number 869884- RECLAIM.

In this paper, the stress behaviour and power generation of cymbal bimorph transducer of different piezoelectric ceramics are studied. Comparison of stress, deformation and power is done between di...

This paper proposes a new design of bimorph-type electrothermal actuators based on flexible Ni-Co substrates and describes the results of the finite element method (FEM) simulation and performance evaluation of the actuators. In the design of the actuators, a multilayer structure consisting of an adhesion layer, two insulation layers, and a Pt (platinum) heater layer was formed on the Ni-Co flexible substrate that was patterned in an individual shape. The thin-film actuators proposed in this study could be detached from a Si carrier wafer and adhered to other micro or macrostructural elements. To investigate the temperature distribution and mechanical behavior of the actuators, multiphysics FEM simulations combining electrothermal and static structural analyses were carried out. The actuators were fabricated using conventional microfabrication and electroplating technologies on Si carrier wafer; then, the actuators were peeled off from the carrier wafer using the release process proposed in this paper. After fabricating the actuators, the deflection of their tips was evaluated and compared with that obtained from the FEM simulations.