51. Multivariable Feedback Relevant System Identification of a Wafer Stepper System
- Author
-
De Callafon, Raymond
- Subjects
feedback ,feedback controller ,positioning ,wafer stepper ,chip manufacturing ,silicon wafers ,discrete-time models ,closed-loop experiments ,robust controller - Abstract
This paper discusses the approximation and feedback relevant parametric identification of a positioning mechanism present in a wafer stepper. The positioning mechanism in a wafer stepper is used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. The accurate positioning requires a robust and high-performance feedback controller that enables a fast throughput of silicon wafers. A control relevant set of multivariable finite dimensional linear time invariant discrete-time models is formulated and estimated on the basis of closed-loop experiments. The set of models is shown to be suitable for model-based robust control design of the positioning mechanism. This is illustrated by a successful design and implementation of a robust controller.
- Published
- 2001