51. Thermal processing of aqueous AZO inks towards functional TCO thin films
- Author
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José C. Martins, Isabel Van Driessche, Christine E. A. Kirschhock, Dieter Cuypers, Kenny Vernieuwe, Jonathan De Roo, Kristof Houthoofd, Henk Vrielinck, Klaartje De Buysser, and Johan Lauwaert
- Subjects
Materials science ,ZINC-OXIDE FILMS ,Transparent conductors ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,LIMIT ,Pulsed laser deposition ,Al-doped ZnO ,Aluminium ,Materials Chemistry ,Tube furnace ,Thin film ,Transparent conducting film ,Sol-gel ,Aqueous solution ,PULSED-LASER DEPOSITION ,Mechanical Engineering ,Metals and Alloys ,021001 nanoscience & nanotechnology ,STATE ,0104 chemical sciences ,Indium tin oxide ,Inkjet printing ,chemistry ,Chemical engineering ,Physics and Astronomy ,Mechanics of Materials ,GROWTH ,CRYSTALLIZATION ,ORIENTATION ,0210 nano-technology ,DOPED ZNO FILMS - Abstract
Aluminium doped zinc oxide is considered an interesting, earth abundant alternative to the transparent conductor indium tin oxide. In this respect, we synthesized Al-ZnO (AZO) thin films by a chemical solution deposition approach. Using water-based inks, the AZO thin films were printed in one single step on glass substrates in non-vacuum conditions. The drying process and the humidity of the atmosphere proved to be crucial during the thermal processing of the wet deposited thin films. To improve the understanding of the phenomena involved, the influence of these processing parameters on the final properties of the AZO thin films are investigated by FTIR, XRD, SEM, 1H and 27Al NMR and resistivity measurements. Optimal conditions were obtained by drying the wet thin film at 120 °C, followed by heating in a tube furnace until 500 °C under a 200 ppm O2/N2 atmosphere with a humidity controlled by bubbling the gas flow through 2 glass bottles containing water at 20 °C. AZO thin films with an resistivity of 2.54 × 10−2 Ω cm were obtained.
- Published
- 2017