51. Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
- Author
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Xin Li, Miao Yuanhao, Huiyong Hu, Rong-Xi Xuan, JianJun Song, and He-Ming Zhang
- Subjects
010302 applied physics ,Diffraction ,Materials science ,business.industry ,General Physics and Astronomy ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Epitaxy ,01 natural sciences ,Crystal ,Full width at half maximum ,Semiconductor ,0103 physical sciences ,Optoelectronics ,Field-effect transistor ,Dislocation ,0210 nano-technology ,business ,Single crystal - Abstract
The analysis of threading dislocation density (TDD) in Ge-on-Si layer is critical for developing lasers, light emitting diodes (LEDs), photodetectors (PDs), modulators, waveguides, metal oxide semiconductor field effect transistors (MOSFETs), and also the integration of Si-based monolithic photonics. The TDD of Ge epitaxial layer is analyzed by etching or transmission electron microscope (TEM). However, high-resolution x-ray diffraction (HR-XRD) rocking curve provides an optional method to analyze the TDD in Ge layer. The theory model of TDD measurement from rocking curves was first used in zinc-blende semiconductors. In this paper, this method is extended to the case of strained Ge-on-Si layers. The HR-XRD scan is measured and Ge (004) single crystal rocking curve is utilized to calculate the TDD in strained Ge epitaxial layer. The rocking curve full width at half maximum (FWHM) broadening by incident beam divergence of the instrument, crystal size, and curvature of the crystal specimen is subtracted. The TDDs of samples A and B are calculated to be 1.41 × 108 cm−2 and 6.47 × 108 cm−2, respectively. In addition, we believe the TDDs calculated by this method to be the averaged dislocation density in the Ge epitaxial layer.
- Published
- 2017
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