101. The effect of boron doping on the lattice parameter of homoepitaxial diamond films
- Author
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F. Brunet, Etienne Gheeraert, P. Germi, M. Burdin, Alain Deneuville, F. Laugier, M. Pernet, and G. Rolland
- Subjects
Materials science ,Condensed matter physics ,Mechanical Engineering ,Doping ,chemistry.chemical_element ,Diamond ,General Chemistry ,Substrate (electronics) ,engineering.material ,Crystal structure of boron-rich metal borides ,Electronic, Optical and Magnetic Materials ,Condensed Matter::Materials Science ,Crystallography ,Lattice constant ,chemistry ,Impurity ,Condensed Matter::Superconductivity ,Physics::Atomic and Molecular Clusters ,Materials Chemistry ,engineering ,Condensed Matter::Strongly Correlated Electrons ,Electrical and Electronic Engineering ,Thin film ,Boron - Abstract
The (004) X-ray rocking curves of undoped and boron doped homoepitaxial diamond films have been recorded up to 8 × 10 20 [ B ] cm −3 . Up to this concentration the films grew coherently, i.e. the in-plane lattice constant of the doped film is the same as that of the substrate. The lattice constants of the boron doped diamond films in their relaxed state have been determined. Boron incorporation induces a large expansion of the lattice constants, especially above the semiconductor-metal transition. We suggest a contribution of both the different size of boron and carbon atoms (Vegard's law) and of hole concentration in the impurity band of boron [with a positive deformation potential of the impurity band of boron of 16 (± 0.3) eV] to describe the experimental results.