101. Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps
- Author
-
Dong-Gi Lee, Bo Li, Quanfang Chen, Gregory P. Carman, and Jason L. Woolman
- Subjects
business.product_category ,Materials science ,Check valve ,Silicon ,business.industry ,technology, industry, and agriculture ,Metals and Alloys ,chemistry.chemical_element ,Structural engineering ,Substrate (electronics) ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Volumetric flow rate ,Hydraulic cylinder ,chemistry ,Etching (microfabrication) ,High pressure ,Electroforming ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Instrumentation - Abstract
A robust passive high frequency high pressure micro check valve was developed for piezoelectrically actuated pumps. A novel cross-patterned microvalve flap is used to increase the valve’s structural stiffness with pressures up to 10 MPa. A mechanical valve stopper prevents valve-flap failure under extreme high pressure. The valve-flap is also designed to work at frequency larger than 10,000 Hz. The valve-flap was fabricated with electroformed nickel on silicon substrate. Deep RIE etching was used to fabricate the valve channels in the silicon substrate. The whole valve weighs 0.2 g including packaging. The microvalve flow rate (water) is measured to be 18 cm3/s under a pressure difference of 50 psi. The microvalve was integrated with a compact piezoelectric pump and produced pressure of 350 psi when operated at 10 kHz frequency.
- Published
- 2005
- Full Text
- View/download PDF