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A micro piezoelectric precision drive system is proposed, which is advantageous due its small size, large transmission ratio, and large output torque. The working principle of the proposed piezoelectric precision drive system is presented, and the nonlinear dynamic model and equations of the system are established. Using the Linz Ted-Poincaré and perturbation methods, the nonlinear approximate solutions of the dynamic equations are calculated. The results indicate that the nonlinear intensity of the drive system is inversely proportional to the number of meshing movable teeth. It was also noted that the rotor is most affected by the nonlinear phenomenon. These results can be utilized both to optimize the dimensions of the piezoelectric precision drive system and to reduce the intensity of vibrations during operation.

MEMS gas sensor is one of the development directions of the sensor, and it must work at a certain temperature, so micro heater is an important part of MEMS gas sensor. In this paper, aiming at the high cost and complex process of Pt film heater, we developed the research of Fe/Cr/Al and Ni/Cr cheap metals replacing Pt metal. With Fe/Cr/Al and Ni/Cr metal as the targets respectively, Fe/Cr/Al and Fe/Cr/Al-Ni/Cr composite thin film was prepared by DC sputtering on the wafer substrate and was made into micro-heater by wet etching after heat treatment. Finally, the film was characterized by scanning electron microscope (SEM), and the performance of micro heater was test. The characterization indicated that the thickness of film was between 500 nm and 800 nm, the grain size of Fe/Cr/Al was about 40 nm. The test results showed that the change of resistance was small in the range of 0-200 oC, so the film suited to be made into micro heater. The relationship between power of micro heater and temperature of chip was linear. The ambient temperature had certain influence on the temperature of chip. In certain DC voltage conditions, when the temperature of chip was 200 oC, power consumption of 75 W Fe/Cr/Al-Ni/Cr composite film was less than 700 mW, and the heating rate was more than 0.5 oC/s. It can satisfy the requirement of MEMS micro gas sensor, which has research value for the substitution of Pt thin film micro heater.

A hybrid energy harvester is presented in this paper to harvest energy from water flow motion and temperature difference in an irrigating pipe at the same time. The harvester is based on the integration of thermoelectric and electromagnetic mechanisms. To harvest the water flow motion, a turbine fan with magnets that are attached on the blades is placed inside of the water pipe. Multiple coils turn the water flow energy into electricity with the rotation of the turbine. The thermoelectric generators (TEGs) are attached around the pipe, so as to harvest energy due to temperature difference. For a maximum temperature difference of 55 °C (hot side 80 °C and room temperature 25 °C), twelve serial-connected TEGs can generate voltage up to 0.346 V. Under a load resistance of 20 Ώ, the power output of 1.264 mW can be achieved. For a maximum water flow rate of 49.9 L/min, the electromagnetic generator (EMG) can produce an open circuit voltage of 0.911 V. The EMG can be potentially used as a water flow meter due to the linear relationship between water flow rate and output voltage. Under the joint action of TEG and EMG, the maximum terminal voltage for TEG is 66 mV and for EMG is 241 mV at load resistances of 10 and 100 Ώ, respectively, resulting in a corresponding power output of 0.435 and 0.584 mW.

Triboelectric nanogenerator (TENG) is a promising technology because it can harvest energy from the environment to enable self-sustainable mobile and wearable electronic devices. In this work, we present a flexible touch pad capable of detecting the contact location of an object and generating substantial energy simultaneously based on the coupling of triboelectric effects and electrostatic induction. The touch pad consists of Polytetrafluoroethylene (PTFE) thin film, multiple Aluminum (Al) electrodes and Polyethylene terephthalate (PET) layers, which can be achieved through low cost, simplified and scalable fabrication process. Different from the conventional multi-pixel-based positioning sensor (i.e., large array of sensing elements and electrodes), the analogue method proposed here is used to implement the positioning function with only four electrodes. Position location can achieve a detecting resolution of as small as 1.3 mm (the size of locating layer is 7.5 cm × 7.5 cm). For the energy harvesting part, a multilayer structure is designed to provide higher current output. The open circuit voltage of the device is around 420 V and the short circuit current can reach up to 6.26 µA with current density of 0.25 µA/cm2. The maximum output power obtained is approximately 10 mW, which is 0.4 mW/cm2. The flexibility and significantly reduced number of electrodes enable the proposed touch pad to be readily integrated into portable electronic devices, such as intelligent robots, laptops, healthcare devices, and environmental surveys, etc.

Triboelectric nanogenerators (TENGs) are highly promising because they can scavenge energy from their working environment to sustainably power wearable/mobile electronics. In this work, we propose a novel and straightforward strategy for six-axis force detection and object controlling by using a self-powered sensor based on TENG. The self-powered sensor can be used in diversified tactile sensing and energy saving applications, which has been demonstrated to be able to detect normal force in the range of 0–18 N. Using the vector properties of external force, six-axis directions in three-dimensional (3D) space is detected. Additionally, it is fabricated with environmental friendly materials, i.e., galinstan and polydimethylsiloxane (PDMS), promoting its applications in more diversified situations. Because of the available and high output voltage as well as the low internal impedance, the self-powered sensor is readily compatible with commercial signal processing and management circuits. The device presented in this work shows robust structure and stable output performance, enabling itself as an ideal human machine interface in self-powered, batteryless, and electric energy saving applications.

As one of the major methods for the diagnosis and treatment of cancers in their early stages, the percutaneous puncture technique has bright prospect in biopsy, ablation, proximity radiotherapy, and drug delivery. Recent years, researchers found the flexible needle cannot realize feedback control during the puncture surgeries only by path planning. To solve this problem, the flexible needle is tried to achieve real-time detection in this paper. Compared with previous methods, the strain gauges glued on the needle surface rather than the medical imaging techniques is used to collect the information to reconstruct the needle curve, which is benefit to integrate the whole system and obtain a more simple and accurate closed-loop control. This paper presented the math model of curve fitting and analyzed the causes of curve fitting errors. To verify the feasibility of this method, an experiment setup was built. Results from the experiments validated the solution in this paper to be effective.

A friction–inertial-based rotary motor driven by shear piezoelectric actuators (SPAs) is proposed in this paper, which possesses many superior features, including high resolution, compact size, large load-capacity, and low cost. In order to eliminate the step loss and increase the step size when an external load is applied, the power-function-shape driving signal was used to actuate the rotary motor. According to the step characteristics under this driving signal, two motion modes were observed and defined, namely the stick-shoot motion mode and the stick-slip-shoot motion mode. The former motion mode can realize a large step size while the later one cannot due to the slipping during the rising phase. After analyzing the results from the numerical simulation and the experiment study, it was found that the motion performance of the motor is closely related to the preload and the base number of the driving signal rather than the size of SPAs, which means the motor can be further downsized according to its actual requirements.

The maneuvering and electrical characterization of nanotubes inside a scanning electron microscope (SEM) has historically been time-consuming and laborious for operators. Before the development of automated nanomanipulation-enabled techniques for the performance of pick-and-place and characterization of nanoobjects, these functions were still incomplete and largely operated manually. In this paper, a dual-probe nanomanipulation system vision-based feedback was demonstrated to automatically perform 3D nanomanipulation tasks, to investigate the electrical characterization of nanotubes. The XY-position of Atomic Force Microscope (AFM) cantilevers and individual carbon nanotubes (CNTs) were precisely recognized via a series of image processing operations. A coarse-to-fine positioning strategy in the Z-direction was applied through the combination of the sharpness-based depth estimation method and the contact-detection method. The use of nanorobotic magnification-regulated speed aided in improving working efficiency and reliability. Additionally, we proposed automated alignment of manipulator axes by visual tracking the movement trajectory of the end effector. The experimental results indicate the system’s capability for automated measurement electrical characterization of CNTs. Furthermore, the automated nanomanipulation system has the potential to be extended to other nanomanipulation tasks.

Advances in flexible and multifunctional electronic devices have enabled the realization of sophisticated skin for robotics applications. In this paper, a large-scale, flexible and self-powered tactile sensing array (TSA) for sensitive robot skin is demonstrated based on the triboelectric effect. The device, with 4 × 4 sensing units, was composed of a top triboelectric polyethylene terephthalate (PET) layer, a bottom triboelectric copper (Cu) layer and a bottom PET substrate. A low-cost roll-to-roll ultraviolet embossing fabrication process was induced to pattern the large-scale top PET film with microstructures for high-output performance. The working mechanism and output performance of the triboelectric TSA were demonstrated and characterized, exhibiting good stability and high sensitivity. By integrating a tactile feedback system, the large-scale TSA, acting as intelligent skin for an industrial robot, was able to realize emergency avoidance and safety stop for various unknown obstacles under various working conditions. The system also has good real-time performance. By using a large-scale roll-to-roll fabrication method, this work pushes forward a significant step to self-powered triboelectric TSA and its potential applications in intelligent robot skin.

A high speed MEMS flow sensor to enhance the reliability and accuracy of a liquid dispensing system is proposed. Benefitting from the sensor information feedback, the system can self-adjust the open time of the solenoid valve to accurately dispense desired volumes of reagent without any pre-calibration. First, an integrated high-speed liquid flow sensor based on the measurement of the pressure difference across a flow channel is presented. Dimensions of the micro-flow channel and two pressure sensors have been appropriately designed to meet the static and dynamic requirements of the liquid dispensing system. Experiments results show that the full scale (FS) flow measurement ranges up to 80 μL/s, with a nonlinearity better than 0.51% FS. Secondly, a novel closed-loop control strategy is proposed to calculate the valve open time in each dispensing cycle, which makes the system immune to liquid viscosity, pressure fluctuation, and other sources of error. Finally, dispensing results show that the system can achieve better dispensing performance, and the coefficient of variance (CV) for liquid dispensing is below 3% at 1 μL and below 4% at 100 nL.

To increase intelligence of walking-assisted devices, it is important to identify motion mode of the subject who wears a walking-assisted device. In this paper, cerebral hemoglobin information was used for recognizing motion mode. Spontaneous upstairs, downstairs, sit-down, and standup movements were performed on seven subjects. During the movement, cerebral hemoglobin information was recorded by applying near-infrared spectroscopic technology. Analyses of variance were performed to compare the rate of change of oxygenated hemoglobin and deoxygenated hemoglobin (oxyHb_rate and deoxyHb_rate) in different motion modes and in different motor-related regions. In PMCR region, oxyHb_rate and deoxyHb_rate were significantly different in the upstairs and downstairs modes( p = 0.001 and p = 0.000); however, they were not obviously different in the sit-down and standup modes ( p = 0.914 and p = 0.836). In PMCL region, oxyHb_rate and deoxyHb_rate were significantly different in the downstairs mode ( p = 0.008), whereas they were not distinctly different in the upstairs mode ( p = 0.601). Results demonstrated that the motion trend of two lower limbs could be identified based on the statistical difference between oxyHb_rate and deoxyHb_rate in the PMCR region. As for cycle-repetitive movement of two lower limbs, upward and downward motion direction could be further recognized based on the difference between oxyHb_rate and deoxyHb_rate in the PMCL region. Since the data using for analyses was those collected before the start of movement, the results will be preferable to provide appropriate reference movements for a walking-assisted device. This is helpful to enhance intelligence of walking-assisted devices.

We report a thermal sensor composed of two multiwalled carbon nano-tubes (MWCNTs) inside a field-emission-scanning electron microscope. The sensor was assembled using a nanorobotic manipulation system, which was used to construct a probe tip in order to detect the local environment of a single cell. An atomic force microscopy (AFM) cantilever was used as a substrate; the cantilever was composed of Si 3 N 4 and both sides were covered with a gold layer. MWCNTs were individually assembled on both sides of the AFM cantilever by employing nanorobotic manipulation. Another AFM cantilever was subsequently used as an end effector to manipulate the MWCNTs to touch each other. Electron-beam-induced deposition (EBID) was then used to bond the two MWCNTs. The MWCNT probe thermal sensor was evaluated inside a thermostated container in the temperature range from 25°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR).

The tendon driven mechanism using a cable and pulley to transmit power is adopted by many surgical robots. However, backlash hysteresis objectively exists in cable-pulley mechanisms, and this nonlinear problem is a great challenge in precise position control during the surgical procedure. Previous studies mainly focused on the transmission characteristics of the cable-driven system and constructed transmission models under particular assumptions to solve nonlinear problems. However, these approaches are limited because the modeling process is complex and the transmission models lack general applicability. This paper presents a novel position compensation control scheme to reduce the impact of backlash hysteresis on the positioning accuracy of surgical robots’ end-effectors. In this paper, a position compensation scheme using a support vector machine based on feedforward control is presented to reduce the position tracking error. To validate the proposed approach, experimental validations are conducted on our cable-pulley system and comparative experiments are carried out. The results show remarkable improvements in the performance of reducing the positioning error for the use of the proposed scheme.

This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calculated and finite element analyses were performed to verify the reliability of the structures. In the gripping experiment, various end effectors of the fingers such as tungsten probes and fibers were tested, and different micro-objects such as glass hollow spheres and iron spheres with diameters ranging from 10 to 800 μm were picked and released. The output resolution is 145 nm/V, and the driven displacement range of the gripper is 43.4 μm. The PZT actuated triple-finger gripper has superior adaptability, high efficiency, and a low cost.

High-speed legged locomotion pushes the limits of the most challenging problems of design and development of the mechanism, also the control and the perception method. The cheetah is an existence proof of concept of what we imitate for high-speed running, and provides us lots of inspiration on design. In this paper, a new model of a cheetah-like robot is developed using anatomical analysis and design. Inspired by a biological neural mechanism, we propose a novel control method for controlling the muscles' flexion and extension, and simulations demonstrate good biological properties and leg's trajectory. Next, a cheetah robot prototype is designed and assembled with pneumatic muscles, a musculoskeletal structure, an antagonistic muscle arrangement and a J-type cushioning foot. Finally, experiments of the robot legs swing and kick ground tests demonstrate its natural manner and validate the design of the robot. In the future, we will test the bounding behaviour of a real legged system.

Making connections is critical in fabrication of MEMS (Micro-Electro-Mechanical Systems). It is also complicated, because the temperature during joining affects both the bond produced and the structure and mechanical properties of the moving parts of the device. Specifications for MEMS packaging require that the temperature not exceed 240 °C. However, usually, temperatures can reach up to 300 °C during conventional thermosonic wire bonding. Such a temperature will change the distribution of dopants in CMOS (Complementary Metal Oxide Semiconductor) circuits. In this paper we propose a new heating process. A semiconductor laser (wavelength 808 nm) is suggested as the thermal source for wire bonding. The thermal field of this setup was analyzed, and specific mathematical models of the field were built. Experimental results show that the heating can be focused on the bonding pad, and that much lower heat conduction occurs, compared with that during the normal heating method. The bond strength increases with increasing laser power. The bond strengths obtained with laser heating are slightly lower than those obtained with the normal heating method, but can still meet the strength requirements for MEMS.

In this study, a flexible tactile sensing array based on a capacitive mechanism was designed, fabricated, and characterized for sensitive robot skin. A device with 8 × 8 sensing units was composed of top and bottom flexible polyethyleneterephthalate (PET) substrates with copper (Cu) electrodes, a polydimethylsiloxane (PDMS) dielectric layer, and a bump contact layer. Four types of microstructures (i.e., pyramids and V-shape grooves) atop a PDMS dielectric layer were well-designed and fabricated to enhance tactile sensitivity. The optimal sensing unit achieved a high sensitivity of 35.9%/N in a force range of 0–1 N. By incorporating a tactile feedback control system, the flexible sensing array as the sensitive skin of a robotic manipulator demonstrated a potential capability of robotic obstacle avoidance.

Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and

Due to scale effects, microoperation, especially the releasing of microobjects, has been a long-standing challenge in micromanipulation applications. In this paper a micromanipulation method is presented based on dynamic adhesion control with compound vibration. This adhesion control technique employs inertia force to overcome adhesion force achieving 100% repeatability with releasing accuracy of 4± 0.5μm, which was experimentally quantified through the manipulation of 20–100μm polystyrene spheres under an optical microscope. The micromanipulation system consists of a microgripper and a piezoelectric ceramics module. The compound vibration comes from the electrostatic actuator and the piezoelectrically driven actuator. Surface and bulk micromachining technology is employed to fabricate the microgripper used in the system from a single crystal silicon wafer. Experimental results confirmed that this adhesion control technique is independent of substrate. Theoretical analyses were conducted to understand the picking up and releasing mechanism. Based on this preliminary study, the micromanipulation system proved to be an effective solution for active picking up and releasing of micromanipulation.