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Your search keyword '"Piezoelectric mems"' showing total 105 results
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105 results on '"Piezoelectric mems"'

103. Lead Zirconate Titanate Piezoelectric Cantilevers for Multimode Vibrating Microelectromechanical Systems

Author

Xuqian, Zheng

Subjects
Electrical Engineering, Piezoelectric MEMS, Lead Zirconate Titanate, Resonators, Cantilevers, Energy Conversion
Abstract

Among the significant advances microelectromechanical systems (MEMS) have enabled in transforming portable low-power electronic devices and integrated energy-efficient systems, piezoelectric MEMS (PiezoMEMS) technologies take an important share of the contributions, especially the ones based on lead zirconate titanate (PZT). In this work, we study the PZT-based PiezoMEMS cantilevers on their mechanical and piezoelectric properties for potential applications. We first introduce the cantilever fabrication process used to achieve optimized piezoelectric properties and designed device structures. Then, we discuss the composite stacking of the cantilevers and the modeling of bending moment and stress distribution. We extract the piezoelectric coefficient of the PZT layer, which is e31 = -5 C/m^2. Next, we evaluate multimode resonances of the cantilevers using theoretical modeling, finite element simulation, and optical and electrical measurements. Finally, we characterize the energy conversion properties of such cantilevers and achieve multimode mechanical-to-electrical energy conversion in ultrasonic frequency ranges.

Published
2015

104. Design and test of resonators using PiezoMUMPS technology

Author

Orla Feely, Joan Pons-Nin, Sergi Gorreta, Elena Blokhina, Diarmuid O'Connell, Manuel Dominguez, Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica, and Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies

Subjects
Materials science, Piezo-MEMS, Process (computing), MEMS resonators, Integrated circuits, Enginyeria electrònica::Microelectrònica::Circuits integrats [Àrees temàtiques de la UPC], Finite element method, Computer Science::Other, Vibration, Resonator, Mechanical vibration, Piezoelectric mems, Electronic engineering, Circuits integrats, Mechanical modes
Abstract

© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.

105. Impact-driven up-conversion in piezoelectric MEMS energy harvesters with pulsed excitation

Author

Pontus Johannisson, Cristina Rusu, and Fredrik Ohlsson

Subjects
History, Materials science, Cantilever, Energy Harvester, 02 engineering and technology, Electrical Engineering, Electronic Engineering, Information Engineering, 01 natural sciences, 7. Clean energy, Education, Frequency converters, Optimal choice, Naturvetenskap, 0103 physical sciences, Piezoelectric mems, Output power, Nanotechnology, Elektroteknik och elektronik, 010302 applied physics, Microelectromechanical systems, business.industry, Up conversion, Frequency up conversion, 021001 nanoscience & nanotechnology, Energy conversion, Computer Science Applications, Length scale, Optoelectronics, Pulsed excitation, Natural Sciences, 0210 nano-technology, business, Piezoelectric MEMS, Energy (signal processing), Excitation
Abstract

The potential of impact-driven frequency up-conversion in a MEMS EH is evaluated using numerical simulations. The investigated design is compared to a conventional cantilever EH in terms of output power and loss rate. The upshifting can lead to significantly increased output power at a similar loss rate but as the time scale for the loss is long, the benefit is limited. This also requires an effective upshifting process. The design of the impact introduces a length scale that must be selected with excitation, gravity, and pre-stress taken into account. This makes this type of EH application-dependent as a non-optimal choice may result in low output power.

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