101. Operando hard X-ray photoelectron spectroscopy study of the Pt/Ru/PbZr0.52Ti0.48O3 interface.
- Author
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Gueye, Ibrahima, Le Rhun, Gwenael, Renault, Olivier, Cooper, David, Ceolin, Denis, Rueff, Jean-Pascal, and Barrett, Nicholas
- Subjects
X-ray photoelectron spectroscopy ,PHOTOELECTRON spectroscopy ,FERROELECTRIC devices ,CAPACITORS ,DIELECTRIC devices - Abstract
We have used hard X-ray photoelectron spectroscopy to probe the Pt/Ru/PbZr
0.52 Ti0.48 O3 (PZT) interface in a Pt/Ru/PZT(220 nm)/Pt/TiO2 /SiO2 /Si stack. A customized sample-holder allows insitu photoemission analysis while applying bias to the capacitor. Hard X-rays probe the buried interface between the top electrode and the ferroelectric PZT. The use of operando conditions reveals a polarization-dependent electronic response, most probably due to imperfect screening of the depolarizing field. There is evidence for an additional core level component related to the electrode-PZT interface. Zr oxide nanostructures at the surface of the sol-gel layer may form a ferroelectric dead layer at the interface, affecting device performance. [ABSTRACT FROM AUTHOR]- Published
- 2017
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