214 results on '"Lio, Anna"'
Search Results
202. Effect of high NA “half-field” printing on overlay error
203. Enabling non-actinic EUV mask inspection using CNT pellicle
204. Measuring and analyzing contact hole variations in EUV lithography
205. EUV scattering from CNT pellicles: measurement and control
206. Challenge of >300W high power LPP-EUV source with long mirror lifetime-III for semiconductor HVM
207. Stochastic defect criticality prediction enabled by physical stochastic modeling and massive metrology
208. EUV dark field lithography: extreme resolution by blocking 0th order
209. Front Matter: Volume 11609
210. Gaussian random field EUV stochastic models, their generalizations and lithographically meaningful stochastic metrics
211. Modeling stochastic effects of exposure/diffusion and dissolution on missing contacts
212. A Molecular-Level Investigation of Organic Interfaces: From Friction to Biosensors
213. EUV progress toward HVM readiness
214. Synthesis of Nh-acyl-α-aminoamides on rink resin: Inhibitors of the hematopoietic protein tyrosine phosphatase (HePTP)
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