201. Study on effect of complexing agents on Co oxidation/dissolution for chemical-mechanical polishing and cleaning process.
- Author
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Kwon, Ohsung, Bae, KiHo, Byun, Jinuk, Lim, Taeho, and Kim, Jae Jeong
- Subjects
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CITRIC acid , *OXIDATION , *GRINDING & polishing , *ALKALINE solutions , *ULTRAVIOLET-visible spectroscopy , *ETHYLENEDIAMINETETRAACETIC acid , *IMPEDANCE spectroscopy - Abstract
The effect of complexing agents on Co oxidation/dissolution in alkaline solution was investigated for Co chemical-mechanical polishing (CMP) and post-CMP cleaning processes. The oxidation and dissolution properties of Co in a solution are greatly affected by complexing agents, which could influence the performance of Co CMP and post-CMP cleaning processes. Herein, three complexing agents, glycine, ethylenediaminetetraacetic acid (EDTA), and citric acid were studied. It was revealed that the complexing agents determined Co dissolution rate depending on the presence or absence of H 2 O 2. Glycine showed a higher Co dissolution rate than EDTA and citric acid in the absence of H 2 O 2 , while EDTA showed the highest dissolution rate in the presence of H 2 O 2. Negligible dissolution was observed with citric acid, regardless of the presence of H 2 O 2. Electrochemical impedance and UV–Vis spectroscopies found that the difference in Co dissolution rates was related to Co oxidation rate and complexation capability of each complexing agent. Glycine showed a higher Co oxidation rate than EDTA, while EDTA had a much higher complexation capability than glycine. Citric acid exhibited the lowest Co oxidation rate and complexation capability, resulting in the slowest Co dissolution rate. Schematic diagram of dissolution rate of Co surface by different complexing agents, affected by oxidation rate and complexation capability. Unlabelled Image • The oxidation and dissolution property of Co surface is affected by complexing agents. • Glycine showed the highest dissolution rate of Co without H 2 O 2 due to better surface oxidation. • EDTA exhibited better dissolution rate than others in the presence of H 2 O 2 because of high complexation capability. • Citric acid deteriorated Co surface with H 2 O 2 during surface oxidation. [ABSTRACT FROM AUTHOR]
- Published
- 2020
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