1. A 1.9-kV/2.61-m ${\text{m}}\Omega\cdot$ cm2 Lateral GaN Schottky Barrier Diode on Silicon Substrate With Tungsten Anode and Low Turn-ON Voltage of 0.35 V.
- Author
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Zhang, Tao, Zhang, Jincheng, Zhou, Hong, Chen, Tangsheng, Zhang, Kai, Hu, Zhuangzhuang, Bian, Zhaoke, Dang, Kui, Wang, Yi, Zhang, Li, Ning, Jing, Ma, Peijun, and Hao, Yue
- Subjects
GALLIUM nitride films testing ,PERFORMANCE of Schottky-barrier diodes ,POWER electronics equipment industry ,SILICON surfaces ,ANODES testing - Abstract
In this letter, we report the achievement of a high-performance lateral GaN Schottky barrier diode (SBD) on a silicon substrate with a low turn- ON voltage (${V}_{ \mathrm{ON}}$) of 0.35 V and tungsten (W) as the anode. Non-field-plated lateral GaN SBDs with the anode–cathode distances (${L}_{\text {AC}}$) of 6, 10, 15, 20, and $25~\mu \text{m}$ demonstrate the reverse breakdown voltages of 0.6, 1.1, 1.25, 1.5, and 1.9 kV with the differential specific ON-resistances (${R}_{\text{ON}, \text {sp}}$) of 0.38, 0.72, 1.23, 1.87, and 2.61 $\text{m}\Omega \cdot $ cm2, respectively. The power figure-of-merit (FOM) is calculated to be $ {1}\times 10^{ {3}}$ , $ {1.7}\times {10}^{ {3}}$ , $ {1.3}\times {10}^{ {3}}$ , $ {1.2}\times {10}^{ {3}}$ , and $ {1.4}\times {10}^{{3}}$ MW/cm2. To the best of our knowledge, this FOM of ${1.7}\times {10}^{{3}}$ MW/cm2 is the highest among all the lateral GaN SBDs on a Si substrate. Combined with the ~108 current ON/OFF ratio at room temperature, the GaN SBD with the W anode shows a great promise for next-generation power electronics. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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