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2. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Author

杨勇 Yang Yong, 唐燕 Tang Yan, 周毅 Zhou Yi, 胡松 Hu Song, and 邓钦元 Deng Qinyuan

Subjects
Surface (mathematics), White light interferometry, Optics, Materials science, business.industry, Frequency domain, High resolution, Electrical and Electronic Engineering, business, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials
Published
2018
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