1. Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system
- Author
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Yufeng Su, Jinzhao Yue, Chaoran Liu, Dongxue Li, Wen Wang, Pan Wang, Weiwei Xia, Junjie Wang, and Zhiyong Duan
- Subjects
Piston pump ,Engineering ,business.industry ,Angle seat piston valve ,Mechanical Engineering ,Radial piston pump ,Axial piston pump ,Mechanical engineering ,02 engineering and technology ,Structural engineering ,021001 nanoscience & nanotechnology ,01 natural sciences ,Surfaces, Coatings and Films ,law.invention ,Cylinder (engine) ,Vibration ,Piston ,General Energy ,law ,0103 physical sciences ,Position-sensing hydraulic cylinder ,010306 general physics ,0210 nano-technology ,business - Abstract
PurposeA self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston.Design/methodology/approachThe self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies.FindingsThe simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston.Originality/valueThe self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration.
- Published
- 2017