1. Nanopatterning surfaces by grazing incidence swift heavy ion irradiation
- Author
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Ivančica Bogdanović-Radović, Maja Mičetić, Henning Lebius, K. Žužek Rožman, B. Ban-d'Etat, Marika Schleberger, Marko Karlušić, Sigrid Bernstorff, M. Krešić, B. Šantić, Milko Jakšić, J.H. O'Connell, Ulrich Hagemann, Ruđer Bošković Institute (IRB), Elettra Sincrotrone Trieste, Matériaux, Défauts et IRradiations (MADIR), Centre de recherche sur les Ions, les MAtériaux et la Photonique (CIMAP - UMR 6252), Université de Caen Normandie (UNICAEN), Normandie Université (NU)-Normandie Université (NU)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Institut de Recherche sur les Matériaux Avancés (IRMA), Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Rouen Normandie (UNIROUEN), Normandie Université (NU)-Institut national des sciences appliquées Rouen Normandie (INSA Rouen Normandie), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Rouen Normandie (UNIROUEN), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université de Caen Normandie (UNICAEN), Institut National des Sciences Appliquées (INSA)-Normandie Université (NU)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Jozef Stefan Institute [Ljubljana] (IJS), Nelson Mandela University [Port Elizabeth], Fakultät für Physik (CeNIDE), Universität Duisburg-Essen = University of Duisburg-Essen [Essen], Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Normandie Université (NU)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Caen Normandie (UNICAEN), Normandie Université (NU)-Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU), Nelson Mandela Metropolitan University [Port Elizabeth, South Africa], and Universität Duisburg-Essen [Essen]
- Subjects
Materials science ,General Physics and Astronomy ,02 engineering and technology ,Surface engineering ,010402 general chemistry ,01 natural sciences ,Fluence ,Ion ,Swift heavy ion ,Etching (microfabrication) ,Irradiation ,swift heavy ion ,ion track ,surface engineering ,nanopatterning ,business.industry ,Physics ,Ion track ,Surfaces and Interfaces ,General Chemistry ,Physik (inkl. Astronomie) ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Isotropic etching ,0104 chemical sciences ,Surfaces, Coatings and Films ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,Optoelectronics ,0210 nano-technology ,business - Abstract
International audience; Nanopatterned surfaces play a key role for many applications exploiting unique features such as an enhanced surface area, long- and short-ranged morphology modulations or a spatial variation of electronic and chemical properties. Ion beam irradiation has been frequently used for nanostructuring bulk materials because it is efficient, fast, and cost-effective. In this paper we show that ion irradiation under extremely grazing incidence in conjunction with other scalable processing methods such as wet etching and thermal annealing, is a perfect tool for nanopatterning of dielectric surfaces. We demonstrate that by tuning ion energy and fluence, one can select different surface nanopattern morphologies like individual chains of nanohillocks, nanostripes, or nanoscaled ripples. Furthermore, chemical etching of the irradiated surface can be used to create a negative replica of the nanopattern as only the material making up the surface track is susceptible to the etching process and is thus removed. Also, a removal of the surface track can be achieved by thermal annealing in vacuum. All these presented strategies open up new ways for achieving control over nanoscale surface modifications using swift heavy ion beams.
- Published
- 2021
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