92 results on '"Berenschot E"'
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2. 165 K Microcooler Operating with a Sorption Compressor and a Micromachined Cold Stage
3. Micro-Machining of a Cryogenic Imaging Array of Transition Edge X-Ray Microcalorimeters
4. A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators
5. PO-1538 Urinary and bowel dysfunction after hypofractionated 20x3 vs 7x6.1 Gy for localized prostate cancer
6. Versatile trench isolation technology for the fabrication of microactuators
7. Cantilever arrays with self-aligned nanotips of uniform height
8. Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning
9. Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever
10. Micromechanically tuned ring resonator in silicon on insulator
11. Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter
12. Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide
13. Optimisation study of micro cantilevers for switching of photonic band gap crystals
14. Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays
15. Nanoimprint Lithography for Nanophotonics in Silicon
16. Fabrication of thick silicon nitride blocks for integration of RF devices
17. Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures.
18. Silicon nanowire fabrication using edge and corner lithography.
19. 3D-nanomachining using corner lithography.
20. Bidirectional electrostatic linear shuffle motor with two degrees of freedom.
21. A CMOS compatible process for improved RF performance on highly doped substrates.
22. Combined Pirani/bending membrane-pressure sensor.
23. 169 kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers.
24. Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA.
25. High pressure check valve for application in a miniature cryogenic sorption cooler
26. Three-dimensional sound intensity measurements using Microflown particle velocity sensors
27. An electrostatic lower stator axial-gap polysilicon wobble motor. II. Fabrication and performance
28. An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling
29. A fabrication process for electrostatic microactuators with integrated gear linkages
30. Etching technology for chromatography microchannels
31. Thermally assisted ion beam etching of polytetrafluoroethylene-a new technique for high aspect ratio etching of MEMS.
32. Electrostatic microactuators with integrated gear linkages for mechanical power transmission.
33. An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication.
34. Etching technology for microchannels.
35. Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications
36. Fabrication of an active nanostencil with intergrated microshutters
37. Combined-Pirani/bending membrane-pressure sensor
38. A CMOS compatible process for improved RF performance on highly doped substrates
39. Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects)
40. Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA
41. Surface micromachined fabrication of piezoelectric AIN unimorph suspension devices for RF resonator applications
42. Fabrication of 3D nanowire frames by conventional micromachining technology
43. Fabrication of an active nanostencil with integrated microshutters
44. An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication
45. Bidirectional electrostatic linear shuffle motor with two degrees of freedom
46. Electrostatic microactuators with integrated gear linkages for mechanical power transmission
47. Electrostatic curved electrode actuators
48. 169 kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers
49. Etching technology for microchannels
50. Combined Pirani/bending membrane-pressure sensor
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