1. Polymer self assembly in semiconductor microelectronics
- Author
-
Black, C.T., Ruiz, R., Breyta, G., Cheng, J.Y., Colburn, M.E., Guarini, K.W., Kim, H.-C., and Zhang, Y.
- Subjects
Computer industry ,Microcomputer industry ,Semiconductor industry ,International Business Machines Corp. -- Product development ,Computer industry -- Product development ,Polymers -- Properties ,Polymers -- Usage ,Semiconductor industry -- Methods - Abstract
We are inspired by the beauty and simplicity of self-organizing materials and the promise they hold for enabling continued improvements in semiconductor technology. Self assembly is the spontaneous arrangement of individual elements into regular patterns; under suitable conditions, certain materials self organize into useful nanometer-scale patterns of importance to higher-performance microelectronics applications. Polymer self assembly is a nontraditional approach to patterning integrated circuit elements at dimensions and densities inaccessible to traditional lithography methods. We review here our efforts in IBM to develop and integrate self-assembly processes as high-resolution patterning alternatives and to demonstrate targeted applications in semiconductor device fabrication. We also provide a framework for understanding key requirements for the adoption of polymer self-assembly processes into semiconductor technology, as well as a discussion of the ultimate dimensional scalability of the technique.
- Published
- 2007