1. Combined use of Finite Element and Equivalent Circuit Modeling for System-Level Simulation of Integrated Capacitive Micromachined Ultrasonic Transducers (CMUT)
- Author
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Alessandro Stuart Savoia, Giuseppe Scaglione, Bruno Haider, Savoia, A.S., Scaglione, G., Haider, B., Savoia, A. S., Scaglione, G., and Haider, B.
- Subjects
010302 applied physics ,FEM ,CMUT ,Computer science ,Acoustics ,System-Design ,System-level simulation ,Integrated circuit ,Noise figure ,01 natural sciences ,Finite element method ,law.invention ,Nonlinear system ,Medical-Imaging ,Capacitive micromachined ultrasonic transducers ,law ,LTSpice ,0103 physical sciences ,Equivalent-Circuit-Method ,Hardware_INTEGRATEDCIRCUITS ,Harmonic ,Equivalent circuit ,Transient (oscillation) ,010301 acoustics ,Electronic circuit - Abstract
This paper proposes the combined use of Finite Element Modeling (FEM) and Equivalent Circuit Modeling (ECM) to describe the nonlinear electromechanical and acoustic behavior of a CMUT in an integrated circuit simulation environment. CMUT ECM lumped parameters are computed by FEM simulations. The proposed method is implemented in LTSpice, and validated by comparing ECM and FEM static, small-signal harmonic, and large-signal transient simulation results. The model was then applied to the performance assessment of the CMUT coupled to a realistic integrated transceiver configuration by computing TX efficiency and noise figure. The proposed approach allows accurate large-signal analysis of CMUTs interfaced to ultrasound front-end circuits by considering non-ideal characteristics of the system, such as the pulser nonlinearities.
- Published
- 2020